应用于手部关节运动的压电驻极体柔性传感器  

Piezoelectric electret flexible sensor for hand joint movement

作　　者：胡宇涵 咸婉婷 刘志远 徐冬 陈宝成 HU Yuhan;XIAN Wanting;LIU Zhiyuan;XU Dong;CHEN Baocheng(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2022年第5期157-160,共4页Transducer and Microsystem Technologies

摘　　要：采用压电驻极体材料聚丙烯(PP)薄膜作为柔性敏感膜,采用膨化及电晕极化工艺对压电驻极体薄膜进行处理,使薄膜的杨氏模量降低,进一步提升其电极化能力,从而提高压电薄膜的压电系数d_(33),进一步增强压电活性。采用准静态压电实验的方法测量薄膜的压电特性,得出本实验中样品d_(33)数值在150~200 pC/N之间。同时发现常温下的薄膜存在电荷衰减现象,因此,采用冷压封装的手段进行处理,提升薄膜的电荷储存稳定性。设计制作出的阵列式压电传感器的输出信号可在不同弯曲角度下表现出不同的特性,表明该传感器可以表征手指的弯曲。实验证明:所制备的敏感膜样品具备了较强的压电活性,在无需进行电路二级放大情况下可以完成可穿戴条件下人体生命体征和人体肢体运动监测。Piezoelectric electret material polypropylene(PP)film is used as the flexible sensitive film,and the piezoelectric electret film is treated by the process of puffing and corona polarization to reduce the Young’s modulus of the film and further improve its electric polarization ability,thereby improves the piezoelectric coefficient d_(33)of the piezoelectric film,and further enhances the piezoelectric activity.The piezoelectric properties of the thin film are measured by the method of quasi-static piezoelectric experiment,and it is concluded that the value of d_(33)of the sample in this experiment is between 150 pC/N and 200 pC/N.Afterwards,it is found that the thin film at room temperature has a phenomenon of charge decay,so cold-pressed packaging is used for processing to improve the charge storage stability of the film.The output signal of the designed array piezoelectric sensor can show different characteristics at different bending angles,indicating that the sensor can characterize the bending of the finger.Experiments show that the prepared sensitive film sample has strong piezoelectric activity,and can complete the monitoring of human vital signs and human limb movement under wearable conditions without the need for secondary amplification of the circuit.

关 键 词：压电驻极体 柔性敏感膜 压电特性 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]