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作 者:陈沁文 张斌珍 段俊萍 邓浩 武鑫磊 Chen Qinwen;Zhang Binzhen;Duan Junping;Deng Hao;Wu Xinlei(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,School of Instrument and Electronics,North University of China,Taiyuan 030051,China)
机构地区:[1]中北大学仪器与电子学院仪器科学与动态测试教育部重点实验室,太原030051
出 处:《微纳电子技术》2022年第4期335-340,355,共7页Micronanoelectronic Technology
基 金:国家自然科学基金资助项目(52175555);国家自然科学基金创新群体资助项目(51821003);山西省高等学校中青年拔尖创新人才资助项目;山西省重点研发项目(国际合作)(201803D421043);山西省“1331工程”重点学科建设基金资助项目。
摘 要:基于分形天线和微电子机械系统(MEMS)工艺,设计了一款超宽带柔性梯形环分形天线,适用于柔性电子设备和可穿戴设备。采用共面波导的方式对天线进行馈电,利用分形结构改变电流路径,使阻抗匹配极大改善,实现了超宽带性能。在最外层梯形环结构上加载弧形边缘,可以进一步改善天线在2.7~14.1 GHz频段内的回波损耗。天线以柔性材料聚二甲基硅氧烷(PDMS)作为介质基板,采用MEMS工艺加工,金属部分两次溅射成型,具有精度高和超宽带性能稳定的特点。制作的天线相对带宽可达157.2%(2.36~19.7 GHz),在共形于20 mm半径的圆柱后,天线最低工作频率向右偏移460 MHz,但仍具有稳定的超宽带特性。在天线的工作频率内,柔性梯形环天线的辐射方向图稳定,测试结果与仿真结果一致性较好。Based on the fractal antenna and micro-electromechanical system(MEMS) technology, an ultra-wideband flexible trapezoidal loop fractal antenna was designed to be suitable for flexible electronic devices and wearable devices. The antenna was fed by the coplanar waveguide, and the fractal structure was used to change the current path, greatly improving the impedance matching and achieving ultra-wideband performance. Loading the arc-shaped edge on the outermost trapezoidal loop structure can further improve the return loss of the antenna within 2.7-14.1 GHz frequency band. The dielectric substrate of the antenna was fabricated by flexible material named polydimethylsiloxane(PDMS). The antenna was processed by MEMS technology, and the metal part was formed by sputtering twice. The antenna is of high accuracy and stable ultra-wideband performance. The relative bandwidth of the fabricated antenna can reach 157.2%(2.36-19.7 GHz). After conforming on a 20 mm-radius cylinder, the lowest operating frequency of the antenna shifts to the right by 460 MHz, but the antenna still has stable ultra-wideband characteristics. Within the operating frequency of the antenna, the radiation pattern of the flexible trapezoidal loop antenna is stable, and the measured results are in good agreement with the simulation results.
关 键 词:微电子机械系统(MEMS) 柔性材料 分形天线 超宽带天线 可穿戴设备
分 类 号:TN823.24[电子电信—信息与通信工程] TH703[机械工程—仪器科学与技术]
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