Application of mathematical morphology operation with memristor-based computation-in-memory architecture for detecting manufacturing defects  

作　　者：Ying Zhou Bin Gao Qingtian Zhang Peng Yao Yiwen Geng Xinyi Li Wen Sun Meiran Zhao Yue Xi Jianshi Tang He Qian Huaqiang Wu 

机构地区：[1]School of Integrated Circuits(SIC),Beijing Innovation Center for Future Chips(ICFC),Tsingfiua University,Beijing,China [2]Beijing National Research Center for Information Science and Technology(BNRist),Tsinghua University,Beijing,China

出　　处：《Fundamental Research》2022年第1期123-130,共8页自然科学基础研究（英文版）

基　　金：the National Natural Science Foundation of China(Grants No.92064001,61851404,and 61874169);the IoT Intelligent Microsystem Center of Tsinghua University-China Mobile Joint Research Institute.

摘　　要：Mathematical morphology operations are widely used in image processing such as defect analysis in semiconductor manufacturing and medical image analysis.These data-intensive applications have high requirements during hardware implementation that are challenging for conventional hardware platforms such as central processing units(CPUs)and graphics processing units(GPUs).Computation-in-memory(CIM)provides a possible solution for highly efficient morphology operations.In this study,we demonstrate the application of morphology operation with a novel memristor-based auto-detection architecture and demonstrate non-neuromoq)hic computation on a multi-array-based memristor system.Pixel-by-pixel logic computations with low parallelism are converted to parallel operations using memristors.Moreover,hardware-implemented computer-integrated manufacturing was used to experimentally demonstrate typical defect detection tasks in integrated circuit(IC)manufacturing and medical image analysis.In addition,we developed a new implementation scheme employing a four-layer network to realize small-object detection with high parallelism.The system benchmark based on the hardware measurement results showed significant improvement in the energy efficiency by approximately 358 times and 32 times more than when a CPU and GPU were employed,respectively,exhibiting the advantage of the proposed memristor-based morphology operation.

关 键 词：MEMRISTOR Computation-in-memory Mathematical morphology Defect detection 

分 类 号：TP333[自动化与计算机技术—计算机系统结构]