SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor  

作　　者：Jongmoon Jang Giulia Panusa Giovanni Boero Juergen Brugger 

机构地区：[1]Microsystems Laboratory,École Polytechnique Fédérale de Lausanne(EPFL),1015 Lausanne,Switzerland [2]Department of Functional Ceramics,Korea Institute of Materials Science(KIMS),51508 Changwon,Republic of Korea [3]Optics Laboratory,École Polytechnique Fédérale de Lausanne(EPFL),1015 Lausanne,Switzerland

出　　处：《Microsystems & Nanoengineering》2022年第1期269-280,共12页微系统与纳米工程（英文）

基　　金：The authors thank the Center of Micro/Nanotechnology(CMi)of EPFL for the microelectromechanical system(MEMS)fabrication support and Bio-Micro Robotics laboratory with Professor Hongsoo Choi of DGIST for the microforce probe system facility support.This work received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation program(Project“MEMS 4.0”,ERC-2016-ADG,Grant Agreement No.742683);the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(No.2020R1F1A107422211).

摘　　要：Glass-like carbon(GC)is a nongraphitizing material composed entirely of carbon atoms produced from selected organic polymer resins by controlled pyrolysis in an inert atmosphere.The GC properties are a combination of the properties of glass,ceramic,and graphite,including hardness,low density,low thermal conductivity,high chemical inertness,biocompatibility,high electrical conductivity,and microfabrication process compatibility.Despite these unique properties,the application of GC in mechanical sensors has not been explored thus far.Here,we investigate the electrical,structural,and chemical properties of GC thin films derived from epoxy-based negative photoresist SU-8 pyrolyzed from 700 to 900°C.In addition,we fabricated microGC piezoresistors pyrolyzed at 700 and 900°C and integrated them into nonpyrolyzed SU-8 cantilevers to create microelectromechanical systems(MEMS)mechanical sensors.The sensitivities of the GC sensor to strain,force,surface stress,and acceleration are characterized to demonstrate their potential and limits for electromechanical microdevices.

关 键 词：CANTILEVER GLASS CARBON 

分 类 号：TM54[电气工程—电器]