基于小波变换的多频静电力显微镜动态过程测量方法  

Wavelet transform based method of measuring multi-frequency electrostatic force microscopy dynamic process

作　　者：王建海 钱建强[1] 窦志鹏 林锐 许泽宇 程鹏 王丞 李磊 李英姿[1] Wang Jian-Hai;Qian Jian-Qiang;Dou Zhi-Peng;Lin Rui;Xu Ze-Yu;Cheng Peng;Wang Cheng;Li Lei;Li Ying-Zi(School of Physics,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学物理学院,北京100191

出　　处：《物理学报》2022年第9期266-272,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:62171012)资助的课题。

摘　　要：静电力显微镜(electrostatic force microscopy,EFM)具有较高的灵敏度和空间分辨率,在新能源材料静电性质的测量中被广泛应用.时间分辨静电力显微镜技术主要用于材料的动态电学性质测量,该技术中常用的泵浦探测方法存在设备装置复杂、成本昂贵、测量存在不确定性等问题.本文采用直接时域测量方法,减小了测量的实现复杂度,通过应用多频激励或者激励悬臂高阶模态的方法实现了EFM多种参数同时测量和时间分辨率的提高,达到了微秒级的时间分辨率,并应用小波变换对测量得到的探针信号进行分析,实现了对材料动态电学性质的提取.通过应用该技术进行仿真实验,实现了对模拟样品电势衰减过程中的动态电势变化和模拟电池放电过程中的离子运动特征时间等性质的测量.Electrostatic force microscopy(EFM)has high sensitivity and lateral resolution,and it is widely used to measure the electrostatic properties of new energy materials.The time-resolved electrostatic force microscope technology is used to measure the dynamic electrical properties of materials,pump detection method commonly used in this technology has problems such as complex equipment,high cost,and uncertainty in the measurement.In this work the method of directly measuring the time domain is adopted.This method reduces the complexity of measurement.By using the multi-frequency or high-frequency excitation method,the simultaneous measurement of multiple EFM parameters and the improvement of time resolution can be achieved,reaching a time resolution of microseconds,and by applying wavelet transform to the tip signal obtained by the measurement the dynamic electrical properties of the materials can be extracted.Applying this technology to simulation experiments,it is possible to measure the dynamic potential changes and the characteristic time parameter of ion movement in the microsecond-level electrical dynamic process of the simulated battery materials.

关 键 词：多频静电力显微镜 时间分辨 动态测量 小波变换 

分 类 号：TH742[机械工程—光学工程]