用于纳米级表面形貌测量的光学显微测头  

Optical microscope probe for the measurement of nano-scale topography

作　　者：李强[1] 任冬梅[1] 兰一兵[1] 李华丰[1] 万宇[1] LI Qiang;REN Dongmei;LAN Yibing;LI Huafeng;WAN Yu(National Key Laboratory of Science and Technology on Metrology&Calibration,Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]航空工业北京长城计量测试技术研究所计量与校准技术重点实验室,北京100095

出　　处：《计测技术》2022年第2期91-96,共6页Metrology & Measurement Technology

基　　金：国家技术基础科研项目(JSJL2015205C004)。

摘　　要：为了满足纳米级表面形貌样板的高精度非接触测量需求,研制了一种高分辨力光学显微测头。以激光全息单元为光源和信号拾取器件,利用差动光斑尺寸变化探测原理,建立了微位移测量系统,结合光学显微成像系统,形成了高分辨力光学显微测头。将该测头应用于纳米三维测量机,对台阶高度样板和一维线间隔样板进行了测量实验。结果表明:该光学显微测头结合纳米三维测量机可实现纳米级表面形貌样板的可溯源测量,具有扫描速度快、测量分辨力高、结构紧凑和非接触测量等优点,对解决纳米级表面形貌测量难题具有重要实用价值。In order to meet the requirements of high-precision non-contact measurement of nano-scale topography specimen,a high-resolution optical microscope probe is developed.Taking the laser holographic unit as the light source and signal pickup device,and using the differential spot size change detection principle,we have established a micro-displacement measurement system.Combined with the optical microscope imaging system,a high-resolution optical microscope probe is implemented.The probe has been integrated in a nano three-dimensional measuring machine to carry out the measurement experiments of step height specimens and onedimensional line spacing specimens.The results show that the optical microscope probe combined with the nano three-dimensional measuring machine can realize the traceable measurement of nano-scale topography specimens,and it has the advantages of fast scanning speed,high resolution,compact structure and non-contact measurement.The development work has important practical value in solving the problem of nano-scale topography measurement.

关 键 词：纳米测量 激光全息单元 位移 光学显微测头 纳米级表面形貌 

分 类 号：TB96[机械工程—光学工程]