小微气体流量计量技术的应用  

Application of Micro Gas Flow Measurement Technology

作　　者：张靓 陆春 孙国杰 佘彬杰 张慧剑 Zhang Liang;Lu Chun;Sun Guojie;She Binjie;Zhang Huijian(Nantong Institute of Metrology and Measurement,Nantong 226011)

机构地区：[1]南通市计量检定测试所,南通市226011

出　　处：《仪器仪表标准化与计量》2022年第2期15-17,共3页Instrument Standardization & Metrology

摘　　要：小微气体流量测量技术广泛应用于航空航天、半导体加工、医疗生物、电子汽车等行业。随着气体小流量测试技术研究的深入,高精度、高可靠的气体小流量标准装置也不断发展。依据层流元件的结构特性可以看出,层流流量计作为标准表也越来越受计量检测单位的重视,其精度高、耐高压、体积小、结构简单、系统装置操作简易,是一个高精度、范围宽的小微气体流量标准装置。已研制成功的基于层流技术的小微气体流量标准装置在国内首次形成便携的小微气体流量计量技术能力。Micro gas flow measurement technology is widely used in aerospace, semiconductor processing, medical biology, electronic vehicles and other industries. With the development of small gas flow measurement technology,the high precision and high reliability small gas flow standard equipment has been developed continuously.According to the structure characteristics of the laminar f low element, the laminar f low meter, as a standard instrument, has been paid more and more attention by the measurement and testing unit, is a high precision, wide range of micro gas flow standard device. The developed micro gas flow standard device based on laminar flow technology is the first portable micro gas flow measurement technology in China.

关 键 词：小微气体流量测量 气体流量计 气体流量标准装置 计量技术 层流技术 

分 类 号：TB937[一般工业技术—计量学]