基于双处理器的等离子体电源控制系统设计  

Design of Plasma Power Supply Control System Based on Dual Processors

作　　者：薛家祥[1] 高喆 周钢 于文庆 XUE Jia-xiang;GAO Zhe;ZHOU Gang;YU Wen-qing(College of Mechanical and Automobile Engineering,South China University of Technology,Guangzhou 510640,China;Dongguan Large Electronics Co.,Ltd.,Dongguan 523070,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广州510640 [2]东莞市钜大电子有限公司,东莞523070

出　　处：《自动化与仪表》2022年第5期11-15,19,共6页Automation & Instrumentation

基　　金：东莞市引进第三批创新科研团队项目(2017360004004);国家自然科学基金资助项目(51875213);东莞市科技装备动员项目(KZ2019-6,KZ2020-01)。

摘　　要：针对现有等离子体电源控制系统稳定性差,动态响应慢以及无法适应多种等离子体负载等问题,该文提出了一种基于双处理器的等离子体电源控制系统,通过前级双管级联Buck-Boost电路以及全桥逆变电路串联谐振电感实现了电源对多种等离子体负载的适应性,同时利用DSP和STM32双处理器分别进行电源管理和系统级控制,保证了在电源功率电路精确控制时还能持续对电源状态进行实时监测,从而提高了电源系统的控制精度和稳定性。通过研制样机验证了该电源控制系统的有效性,表明了该设计具有实际应用价值。Aiming at the problems of poor stability of the existing plasma power control system,slow dynamic response,and inability to adapt to multiple plasma loads,a plasma power supply control system based on dual processor is proposed in this paper.The adaptability of the power supply to a variety of plasma loads is realized through the front-stage dual-tube cascaded Buck-Boost circuit and the full-bridge inverter circuit with series resonance inductance.At the same time,DSP and STM32 dual processors are used for power management and system level control respectively,so as to ensure that the power supply state can be continuously monitored in real time when the power supply power circuit is accurately controlled.Thus,the control accuracy and stability of the power supply system are improved.The effectiveness of the power control system is verified by developing a prototype,which shows that the design has practical application value.

关 键 词：等离子体电源 双处理器 STM32 DSP 

分 类 号：TN86[电子电信—信息与通信工程]