Stability analysis of quasicrystal torsion micromirror actuator based.on the strain gradient theory  

基于应变梯度理论的准晶扭转微镜驱动器的稳定性分析

作　　者：Yunzhi Huang Miaolin Feng Xiuhua Chen 黄允祗;冯淼林;陈秀华

机构地区：[1]Department of Engineering Mechanics,School of Naval Architecture,Ocean and Civil Engineering,Shanghai Jiao Tong University,Shanghai 200240,China [2]School of Aeronautics and Astronautics,Shanghai Jiao Tong University,Shanghai 200240,China

出　　处：《Acta Mechanica Sinica》2022年第3期119-131,I0003,共14页力学学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.11572191,51701117,and 51779139).

摘　　要：Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted along the urtiaxial or biaxial direction,which limited the range of light reflection.In this·paper,a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established.The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory.The results of three kinds of mirror deflection directions are compared and analyzed.The results show the significant differences in the torsion models with different deflection axis directions.When the deflection angle along the oblique axis reaches 45°,the instability voltage is the smallest.The pull-in instability voltage increases with the increment ofphonon-phason coupling elastic modulus and phason elastic modulus.The perrriittivity of quasicrystal,the strain gradient parameter,and the air damping influence the torsion of the micromirror dynaniic system.A larger pull-in instability voltage generates with the decrease of surface distributed forces.静电扭转微镜广泛应用于微米光开关、光衰减器、光学扫描仪和光学显示器等领域.过去微镜镜面主要沿单轴或双轴方向偏转,从而限制了入镜光线的反射范围.本文通过建立圆形静电驱动微镜的动力学模型,设计了一种可任意方向偏转的准晶微镜驱动器.然后基于应变梯度理论进行数值求解,分析了其静态和动态现象以及吸合失稳特性,并比较了反射镜面在三种偏转方向下的结果.研究表明,镜面沿着不同方向偏转的结果存在显薯差异.当沿斜轴的偏转角度达到45°时,吸合失稳电压值最小.失稳电压还随着准晶的声子场-相位子场耦合弹性模量和相位子场弹性模量的增加而增加.准晶的介电常数、应变梯度参数和空气阻尼都会影响到徼镜动态系统的扭转.此外,微镜表面分布力的减小也会导致更大的吸合失稳电压.

关 键 词：QUASICRYSTALS Torsion micromirror INSTABILITY Strain gradient theory 

分 类 号：TB33[一般工业技术—材料科学与工程]