High-Sensitive Numerical Gas Detection Using LSPR Effect and Fano Resonance in a Slotted MDM Structure  

作　　者：Hai LIU Benlei ZHAO Xu ZHANG Hancheng ZHANG Bo WU Shoufeng TANG 

机构地区：[1]School of Information and Control Engineering,China University of Mining and Technology,Xuzhou 221116,China

出　　处：《Photonic Sensors》2022年第2期164-174,共11页光子传感器（英文版）

基　　金：Thanks to the State-Level Experimental Teaching Demonstration Center for Electrotechnics and Electronics in CUMT for providing the computing servers.This work was supported by the National Natural Science Foundation of China(Grant No.51874301);the Primary Research&Development Plan of Xuzhou City(Grant No.KC20162).

摘　　要：A high-sensitive numerical measurement of methane based on the combined use of the localized surface plasmon resonance(LSPR)and Fano resonance in a slotted metal-dielectric-metal(MDM)periodic structure is numerically investigated.A groove is etched in an original MDM structure to excite the diploe mode at both sides of the groove,and the coherent coupling of two dipole modes is enhanced to realize a fast response,which is beneficial to gas-sensing.The influence of geometric parameters on the reflection spectra and methane sensitivity are analyzed to obtain optimal geometry.Moreover,an etching ring is introduced on the top metal to further raise the coupling area and coupling strength.The Fano resonance is subtly integrated into the optimized structure with asymmetry to achieve greater gas sensitivity.After the introduction of the Fano resonance,the field enhancement caused by the LSPR effect becomes greater and the methane sensitivity can reach up to 8.421 nm/%in numerical calculations,which increases 56.8%more than that of the original one.The combined use of the LSPR and Fano resonance in an optimized MDM structure provides an effective method for high-sensitive gas detection.

关 键 词：Localized surface plasmon resonance Fano resonance gas sensors MDM structure 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]