面向水下应用的电容式微机械超声换能器  

Capacitive micromachined ultrasonic transducer for underwater applications

作　　者：何常德 张盛东[1,2] 张斌珍[3] 张文栋[3] 薛晨阳[3] HE Changde;ZHANG Shengdong;ZHANG Binzhen;ZHANG Wendong;XUE Chenyang(School of Electronic and Computer Engineering,Peking University,Shenzhen 518055,China;School of Electronics Engineering and Computer Science,Peking University,Beijing 100871,China;State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]北京大学信息工程学院,深圳518055 [2]北京大学信息科学技术学院,北京100871 [3]中北大学动态测试技术省部共建实验室,太原030051

出　　处：《应用声学》2022年第3期405-411,共7页Journal of Applied Acoustics

基　　金：国家重点研发计划项目(2016YFC0105004);国家自然科学基金项目(61927807)。

摘　　要：电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为􀀀218.29 dB、􀀀219.39 dB和􀀀218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。Capacitive micromachined ultrasonic transducer(CMUT)has many advantages,such as broadband,and easy fabrication of two-dimensional array and so on.It has become an important ultrasonic transducer.Imaging sonar system has an urgent demand for new ultrasonic transducers.This paper designed the structure and parameters of CMUT,also fabricated the CMUT by silicon micromachining technology.Finally,the main performance parameters of the transducer were tested and analyzed.The test results show that the transducer has the function of transmitting and receiving ultrasonic.Its center operating frequency is 1.965 MHz.Its fractional bandwidth at 6 dB is 109.4%.Its receiving sensitivities are􀀀218:29 dB,􀀀219:39 dB and􀀀218:11 dB at 1 MHz,2 MHz and 3 MHz respectively.The CMUT shows excellent broadband characteristics.Its working frequency and receiving sensitivity basically meet the requirements of high frequency imaging sonar system.

关 键 词：电容式微机械超声换能器 二维阵列 三维超声成像 晶圆键合 宽频带 

分 类 号：TB552[理学—物理]