厚度模压电超声换能器无源声学材料研究进展  

Research progress of passive acoustic materials for thickness-mode piezoelectric ultrasonic transducers

作　　者：陈燕 林兴国 李明 袁懋诞 纪轩荣 CHEN Yan;LIN Xingguo;LI Ming;YUAN Maodan;JI Xuanrong(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;CGN Inspection Technology of Company,Shenzhen 215004,China)

机构地区：[1]省部共建精密电子制造技术与装备国家重点实验室广东工业大学机电工程学院,广州510006 [2]中广核检测技术有限公司,深圳215004

出　　处：《应用声学》2022年第3期490-502,共13页Journal of Applied Acoustics

基　　金：国家自然科学基金项目(11804059,51975131,51805097);广东省引进创新创业团队项目(2016ZT06G375)。

摘　　要：厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。Thickness-mode piezoelectric ultrasonic transducer is the core device in the ultrasonic imaging and detection system,which can realize ultrasonic transmission,reception and signal conversion.The main components of a transducer include piezoelectric(or active)layer,matching layer and backing layer.The performances of the transducers determine the overall properties of ultrasound equipment,and affect their applications in detection,medicine and military,etc.In order to improve the performance of the ultrasonic transducer,passive acoustic functional materials such as matching layer and backing layer have also drawn much attention in enhancing the transducer properties except for improving the piezoelectric layer.In this paper,the research and developing trend of passive acoustic materials such as matching layers,backing layers and acoustic lens was reviewed and prospected.

关 键 词：厚度模 压电超声换能器 匹配层 背衬层 声透镜 

分 类 号：TB552[理学—物理] O426.9[理学—声学]