蓝宝石复杂表面光学元件精密–超精密磨削机理及关键技术研究进展  

Research Progress on Precision and Ultra-Precision Grinding Mechanism and Key Technology on Sapphire Optical Elements With Complex Surface

作　　者：王盛 赵清亮[1] 王生 王金虎 戚春亮 王建勇 WANG Sheng;ZHAO Qingliang;WANG Sheng;WANG Jinhu;QI Chunliang;WANG Jianyong(Harbin Institute of Technology,Harbin 150001,China;Ultra-Precision Machining Center,Zhejiang University of Technology,Hangzhou 310014,China)

机构地区：[1]哈尔滨工业大学,哈尔滨150001 [2]浙江工业大学超精密加工研究中心,杭州310014

出　　处：《航空制造技术》2022年第9期69-80,共12页Aeronautical Manufacturing Technology

基　　金：国家重点研发计划(2018YFA0703400)。

摘　　要：蓝宝石复杂表面光学元件因其优异机械性能和光学性能被广泛应用于高端科技和航空航天等领域,而蓝宝石的高硬脆性和复杂表面的高精度要求对光学制造能力提出了巨大挑战。分析了蓝宝石复杂表面光学元件的磨削机理及关键制造技术研究现状,首先从蓝宝石材料性能、表面和亚表面损伤、工具和工具磨损、能场辅助和残余应力等方面阐述了蓝宝石磨削机理,然后对高陡度蓝宝石保形整流罩、非球面光学元件超精密磨削加工技术进行研究,最后对蓝宝石自由曲面超精密磨削加工关键技术进行总结与展望。Sapphire complex surface optical components are extensively utilized in high-end technology and aerospace fields due to their excellent mechanical and optical properties, while the high hardness and brittleness of sapphire and the high precision requirements of complex surfaces pose great challenges to optical fabrication capabilities. The research status of grinding mechanism and key manufacturing technology of sapphire complex surface optical components were reported. Firstly, the sapphire grinding mechanism was described in terms of sapphire material properties, surface subsurface damage, tool and tool wear, energy field assistance and residual stress, then the ultra-precision grinding processing technology of deep conformal rectifier and aspheric optical components of sapphire were investigated, and finally the key technology of sapphire free-form surface ultra-precision grinding processing was summarized and prospected.

关 键 词：高硬脆材料 蓝宝石 磨削机理 超精密磨削 复杂表面 在位检测 

分 类 号：O786[理学—晶体学] TH74[机械工程—光学工程]