石墨烯纳米孔传感器制造与单分子过孔形态检测  

Graphene Nanopore Sensor Fabrication and Single Molecule Translocation Form Detection

作　　者：袁志山 戴敏[1,2] 郑李娟 王成勇[1,2] YUAN Zhi-shan;DAI Min;ZHENG Li-juan;WANG Cheng-yong(Guangdong Provincial Key Laboratory of Minimally Invasive Surgical Instruments and Manufacturing Technology,Guangdong University of Technology,Guangzhou 510006;School of Electro-mechical Engineering,Guangdong University of Technology,Guangzhou 510006)

机构地区：[1]广东工业大学广东省微创手术器械设计与精密制造重点实验室,广州510006 [2]广东工业大学机电工程学院,广州510006

出　　处：《机械工程学报》2022年第5期190-197,共8页Journal of Mechanical Engineering

基　　金：广东省自然科学基金(2021A1515012457);国家自然科学基金(51805098);广州市科技计划(201804010195)资助项目。

摘　　要：石墨烯是已知最薄的二维材料,其厚度仅为0.335 nm。与传统固态纳米孔相比,石墨烯纳米孔传感器具有极高的检测分辨率。通过MEMS工艺与二维材料湿法转移工艺组合制造出石墨烯薄膜芯片。其中,使用Raman和氦离子显微镜成像判别转移后石墨烯质量。随后,采用氦离子束刻蚀技术在单层石墨烯薄膜上制造出直径为20 nm的石墨烯纳米孔。测量出石墨烯纳米孔传感器电流-电压关系,与经典纳米孔电导理论符合。本论文研究表明单层石墨烯纳米孔传感器检测可检测出牛血清蛋白(Bovine serum albumin, BSA)水平,垂直和旋转三种过孔形态,阻塞电流值分别为1200 pA, 150 A, 650 pA。同时也辨识出多分子同时过孔信号,BSA分子排列成三角形状穿过石墨烯纳米孔。Graphene is the thinnest two-dimensional material, with 0.335 nm thick. Compared with traditional solid-state nanopore,graphene nanopore sensor has high detection resolution. Graphene membrane chip is fabricated by MEMS and two-dimensional material wet transfer technology. Raman and helium ion microscopy are used to detect the quality of graphene membrane after transfer. Subsequently, graphene nanopore with 20 nm diameter is fabricated on a single layer graphene membrane by helium ion beam etching. The measured current-voltage relationship of the graphene nanopore sensor is consistent with the classical conductivity theory of nanopore. The results show that the single layer graphene nanopore sensor can detect three kinds of Bovine Serum Albumin(BSA) translocate morphology, i.e. horizontal, vertical and rotary, with blocking current values of 1200 pA, 150 pA and 650 p A.Signal of multiple molecules passing through graphene nanopore is also identified, the BSA molecules were arranged in a triangle shape through the graphene nanopore.

关 键 词：石墨烯 纳米孔传感器 聚焦离子束 BSA分子检测 

分 类 号：TB383[一般工业技术—材料科学与工程]