基于BRDF的光学表面疵病散射特性的仿真研究  

Simulation of Scattering Characteristics of Optical Surface Defects Based on BRDF

作　　者：向江华 刘缠牢[1] XIANG Jiang-hua;LIU Chan-lao(School of Optelectronic Engineering,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021

出　　处：《光学与光电技术》2022年第2期54-60,共7页Optics & Optoelectronic Technology

摘　　要：为了研究精密光学元件表面微弱疵病的散射特性,基于矢量散射理论和双向反射分布函数,建立了光学表面微弱疵病的散射理论模型。通过仿真计算了双向反射分布函数随散射角的变化情况,分析了入射角度、入射光波长以及疵病自身尺寸等因素对疵病散射光特性的影响。基于仿真数据分析,针对光源参数对散射特性的影响进行仿真分析,为使用暗场成像法进行精密表面疵病检测的系统参数选择提供理论参考,疵病检测入射角范围为30°~50°最佳;在可见光范围内时,380~500 nm的波长范围更有利于疵病检测。另外还通过研究疵病尺寸发生改变时散射场变化的规律,为分辨疵病的形状大小等信息提供了参考依据。In order to study the scattering characteristics of weak defects on the surface of precision optical elements,a scattering theoretical model of weak defects on the optical surface is established based on vector scattering theory and bidirectional reflection distribution function. The variation of bidirectional reflection distribution function with scattering angle is simulated,and the effects of incident angle,incident light wavelength and defect size on the scattered light characteristics of defects are analyzed. Based on the analysis of simulation data,the influence of light source parameters on scattering characteristics is simulated and analyzed,which provides a theoretical reference for the selection of system parameters for precision surface defect detection using dark field imaging method. The range of incidence angle for defect detection is 30° ~ 50°. In the visible light range,the wavelength range of 380~500 nm is more conducive to defect detection.In addition,by studying the variation law of scattering field when the defect size changes,it provides a reference basis for distinguishing the shape and size of defects.

关 键 词：双向反射分布函数 矢量散射 表面疵病 散射特性 显微暗场成像 

分 类 号：TN247[电子电信—物理电子学]