射频磁控溅射制备硼碳氮薄膜的拉曼光谱研究  

Raman Spectroscopy of Boron Carbon Nitride Films Prepared by RF Magnetron Sputtering Method

作　　者：刘彩云 李宇婧 高伟[1] 殷红[1] LIU Caiyun;LI Yujing;GAO Wei;YIN Hong(State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun, 130012, PR China)

机构地区：[1]吉林大学超硬材料国家重点实验室,长春130012

出　　处：《光散射学报》2022年第1期6-9,共4页The Journal of Light Scattering

基　　金：国家自然科学基金(No.51872113,No.51572105)。

摘　　要：硼碳氮(BCN)三元化合物薄膜具有原子可调组成比,并且能够展现出相应的材料特性,因此在力、热、光、电子学等领域拥有广阔的应用前景。本文采用射频磁控溅射法在硅衬底上通过调节通入的氮气流量,合成了一系列不同组分的BCN薄膜。发现随氮气流量的增加,所制备的BCN薄膜中氮原子浓度最高可达~14 at.%。为探讨BCN三元体系中的结构性质变化,利用拉曼光谱系统地研究了不同氮气流量所制备的BCN薄膜。结果表明,随氮的逐渐引入,除常见的拉曼D峰和G峰外,光谱中还出现了N=N的拉伸振动模式。另外,样品的无序度也导致了拉曼光谱发生了整体的变化。Boron carbonitride(BCN)ternary compound films have adjustable composition ratio of atoms,and can show the corresponding material properties,so has broad application prospects in the field of mechanics,thermology,optic,electronics and so on.In this work,we report the synthesis of BCN films with various compositions on p-type Si(100)substrates via radio frequency(rf)magnetron sputtering.As N_(2) flow increases,nitrogen atoms can be incorporated into the turbostratic structure with a concentration of~14 at.%.In addition to D and G bands,the N=N stretching morder to investigate the changes of structure and properties of BCN ternary system,Raman spectroscopy was used to systematically study the preparation of BCN ternary system with different nitrogen flow rates.The results show that,ode in Raman spectra becomes visible due to the excess of nitrogen incorporation.In addition,the disorder of the sample also led to an overall change in the Raman spectrum.

关 键 词：硼碳氮 薄膜 拉曼光谱 

分 类 号：O657.37[理学—分析化学]