磁流变抛光二次非球面工件位置对刀校正  

Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

作　　者：张瑜 张峰[1] 郭芮[1] 苏瑛[1] 张云龙[1] 许增奇 王阜超 ZHANG Yu;ZHANG Feng;GUO Rui;SU Ying;ZHANG Yunlong;XU Zengqi;WANG Fuchao(Xi'an Institute of Applied Optics,Xi'an 710065,China)

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2022年第3期518-523,共6页Journal of Applied Optics

基　　金：国防基础科研项目(JCKY2020208B021)。

摘　　要：近年来,磁流变抛光作为一种确定性加工方法已成为获得高精度非球面的重要手段。作者以回转对称二次抛物面为例,分析了磁流变抛光中使用抛光轮校正工件位置的理论方法,并通过实验在Φ230 mm熔石英样件上验证对刀理论,分别在X方向和Y方向以少于3次的调整次数校正工件位置,实现了X方向、Y方向偏置量均低于0.009 mm;采用磁流变抛光技术对工件进行了修形实验验证,加工后面形精度RMS由λ/7收敛至λ/40。实验结果表明:作者提出的非球面工件位置对刀校正方法简单、可靠,能够很好地对工件进行精确定位,利于高精度非球面磁流变抛光加工。In recent years,the magneto-rheological polishing as a deterministic processing method has become an essential way to obtain the high-precision aspheric surfaces.Take the rotationally symmetric secondary paraboloid as an example,the theoretical method of using the polishing wheel to calibrate the workpiece position in magneto-rheological polishing was analyzed,and the experimental verification was carried out on aΦ230 mm fused quartz workpiece.The workpiece position was calibrated with less than 3 times of adjustment in the X direction and Y direction,respectively,and the offset in both X direction and Y direction was lower than 0.009 mm,respectively.The surface polishing experiment was conducted by magneto-rheological polishing technology on the workpiece,and the root-mean-square(RMS)of surface shape was converged fromλ/7 toλ/40 after processing.The experimental results show that the proposed tooling calibration method of aspheric workpiece position is simple and reliable,which can accurately locate the workpiece and conducive to magneto-rheological polishing processing for high-precision aspheric surface.

关 键 词：非球面 磁流变抛光 对刀校正 面形精度 

分 类 号：TN206[电子电信—物理电子学]