接触式轮廓仪的测量精度问题  

The measurement accuracy of contact profilometer

作　　者：张穗 刘楠[1] Zhang Sui;Liu Nan(Shaanxi Industrial Vocational And Technical College,Xianyang Shaanxi,712000)

机构地区：[1]陕西工业职业技术学院,陕西咸阳712000

出　　处：《电子测试》2022年第8期55-57,共3页Electronic Test

基　　金：陕西工业职业技术学院科研项目(2021YKZX-0080)。

摘　　要：本文主要研究了接触式轮廓仪的测量精度问题。通过数据的线性拟合和曲线拟合方法,对所提供被测工件的轮廓仪测量数据进行分析处理,建立了轮廓线各项参数的求解模型和偏移数据的校正模型,计算出了被测工件各项参数的估计值及偏移数据的校正值。This paper mainly studies the measurement accuracy of contact profilometer.By means of linear fitting and curve fitting method,the contour measuring data of the measured workpiece were analyzed and processed,the solving model of contour parameters and the correction model of offset data were established,and the estimated values of parameters of the measured workpiece and correction values of offset data were calculated.

关 键 词：平滑处理 线性拟合 仿射变换模型 均值法 

分 类 号：TH71[机械工程—测试计量技术及仪器]