TiN/MT-TiCN/Al_(2)O_(3)/TiOCN多层涂层的热稳定性能研究  

Study on the Thermal Stability of Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN Multilayer Coating

作　　者：司婷婷 朱丽慧[1] 刘庆露 Si Tingting;Zhu Lihui;Liu Qinglu(School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China)

机构地区：[1]上海大学材料科学与工程学院,上海200444

出　　处：《硬质合金》2022年第2期102-110,共9页Cemented Carbides

基　　金：美国Kennametal公司资助项目。

摘　　要：本文采用化学气相沉积技术制备Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN多层涂层。利用扫描电子显微镜、X射线衍射仪、拉曼光谱仪、显微硬度计、划痕仪和往复式摩擦磨损试验机表征该多层涂层不同温度真空退火处理前后的组织结构、硬度、结合强度及摩擦磨损性能,以研究其热稳定性能。结果表明:Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN多层涂层在真空退火后拉曼光谱中有C原子峰出现;表面粗糙度增加;退火后涂层的硬度和结合强度下降幅度较为显著,但随着退火温度的升高下降变缓;由于退火后涂层表面粗糙度增加、硬度和结合强度降低,导致涂层的磨粒磨损、氧化磨损、粘着磨损以及疲劳磨损加剧,900℃退火后多层涂层的磨损率是未退火涂层的1.14倍,耐磨性降低。与经过微喷砂处理的Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN多层涂层相比,未经过微喷砂处理的Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN多层涂层耐磨性更优,具有良好的热稳定性能。Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN multilayer coatings were prepared by chemical vapor deposition.The thermal stability of the multilayer coatings was studied by comparing the microstructure,hardness,adhesion strength and friction and wear properties of coatings before and after vacuum annealing at different temperatures with a scanning electron microscope,an X-ray diffractometer,a Raman spectrometer,a micro-Vickers hardness tester,a scratch tester and a reciprocating friction and wear tester.The results show that some peaks belonging to carbon atoms appear in the Raman spectra of the multilayer coatings annealed in vacuum.The surface roughness of annealed Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN multilayer coatings increases.The micro-hardness and adhesion strength of the annealed coatings decrease obviously,but their decreases slow down with the raise of annealing temperature.The abrasive wear,oxidation wear,adhesive wear and fatigue wear of annealed coatings are aggravated due to the increased surface roughness and the reduced micro-hardness and adhesion strength.The wear rate of the coating annealed at 900℃ increases to 1.14 times that of the unannealed coating,which indicates that the wear resistance of the annealed coating deteriorates.Compared with the micro-blasted Ti N/MT-Ti CN/Al_(2)O_(3)/Ti OCN multilayer coating,the coating without the micro-blasting process is superior in terms of wear resistance,showing good thermal stability.

关 键 词：多层涂层 热稳定性能 微喷砂 硬度 结合强度 摩擦磨损性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]