高温合金GH4169水导激光钻孔工艺特性研究  

Research on process characteristics of water-guided laser drilling for superalloy GH4169

作　　者：于永飞 乔红超 曹治赫[1,2,4] 赵吉宾 张旖诺[1,2,4,5] 梁金盛 滕啸天 YU Yong-fei;QIAO Hong-chao;CAO Zhi-he;ZHAO Ji-bin;ZHANG Yi-nuo;LIANG Jin-sheng;TENG Xiao-tian(Key Laboratory of Networked Control Systems,Chinese Academy of Sciences,Shenyang 110016,China;Chinese Academy of Sciences,Shenyang 110016,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;Institutes for Robotics and Intelligent Manufacturing,Chinese Academy of Sciences,Shenyang 110169,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院网络化重点实验室,辽宁沈阳110016 [2]中国科学院沈阳自动化研究所,辽宁沈阳110016 [3]东北大学机械工程与自动化学院,辽宁沈阳110819 [4]中国科学院机器人与智能制造创新研究院,辽宁沈阳110169 [5]中国科学院大学,北京100049

出　　处：《激光与红外》2022年第4期508-514,共7页Laser & Infrared

基　　金：国家自然科学基金项目(No.51875558)资助。

摘　　要：为研究水导激光加工工艺参数对材料微孔成型质量的影响,本文以高温合金GH4169为实验材料,利用水导激光设备在不同激光功率和扫描速度下进行螺旋制孔实验。采用白光干涉仪、扫描电子显微镜和能谱仪分别对加工孔的微观形貌、组织结构以及加工前后的元素含量进行测量。实验结果表明,加工过程中产生了重铸层,其厚度在0~10μm之间,重铸层的氧元素含量(22.2%)相比基体的氧元素含量(11%)增加了102%;粗糙度值Ra在实验范围内随着激光功率和扫描速度的增大而减小,在激光功率为41 W扫描速度为1.8mm/s时,获得最小的Ra值为5μm;孔壁面切削形貌特征自上而下分成三层,即光滑细纹层、熔融物附着层、粗纹层。研究结果为进一步提高水导激光精密钻孔工艺提供了理论依据。To study the influence of water-guided laser machining parameters on the quality of material micro-hole forming,super-alloy GH4169 is adopted as the experimental material,and the water-guided laser machining equipment is used to carry out the rotary cutting holes experiment under different laser power and scanning speed.The micro-morphology,microstructure and element content before and after the processing of the recast layer of the machined hole are measured by white light interferometer(WLI),scanning electron microscope(SEM)and energy spectrometer(EDS),respectively.The experimental results show that the recast layer is formed during the processing,and its thickness is between 0~10μm.The oxygen content of the recast layer(22.2%)is 102%higher than that of the matrix(11%).The roughness value Ra decreases with the increase of laser power and scanning speed within the experimental range.When the laser power is 41 W,the scanning speed is 1.8 mm/s,and the minimum Ra value is 5μm.The hole wall′s cutting morphology characteristics are divided into three layers from top to bottom including smooth fine grain layer,melt adhesion layer and coarse grain layer.The research results provide a theoretical basis for further improving the water-guided laser precision drilling technology.

关 键 词：水导激光钻孔 GH4169 激光功率 扫描速度 孔壁粗糙度 微观组织 

分 类 号：TN249[电子电信—物理电子学]