基于发射光谱的大气压脉冲调制氩表面波等离子体的特性  

Characteristics of pulse-modulated surface wave plasmas in argon at atmospheric-pressure by means of optical emission spectroscopy

作　　者：陈传杰 刘博通 方忠庆 王媛媛[1] 李娜 周锋[1] 王如刚[1] CHEN Chuanjie;LIU Botong;FANG Zhongqing;WANG Yuanyuan;LI Na;ZHOU Feng;WANG Rugang(School of Information Engineering,Yancheng Institute of Technology,Yancheng Jiangsu 224051,China;Key Laboratory for Advanced Technology in Environmental Protection of Jiangsu Province,Yancheng Jiangsu 224051,China)

机构地区：[1]盐城工学院信息工程学院,江苏盐城224051 [2]江苏省新型环保重点实验室,江苏盐城224051

出　　处：《南昌大学学报（理科版）》2022年第1期24-31,共8页Journal of Nanchang University(Natural Science)

基　　金：国家自然科学基金资助项目(51806186);江苏省高等学校自然科学研究面上项目(20KJB140025);江苏省新型环保重点实验室开放基金(JBGS032);盐城工学院引进人才校级科研项目(XJR2020031);大学生创新创业项目(2021369)资助。

摘　　要：以微波表面波形式激励的大气压放电等离子体能够在远离发生器的区域产生高密度等离子体且无需波导约束电磁波传输,从而提高了实际应用中微波耦合等离子体的处理效率和可操作性。本文介绍了表面波等离子体源的装置结构及其放电机制。基于等离子体发射光谱,利用H_(α)谱线的斯塔克展宽法和谱线-连续谱比值法分别诊断了等离子体中电子密度和温度,研究了脉冲调制等离子体在放电过程中电子密度和温度随瞬时功率、调制频率和轴向位置的变化规律,以及氩原子谱线强度的时间演化,并讨论了对电子密度和温度的影响机制以及等离子体余辉过程中激发态氩原子的产生机制。结果表明,等离子体电子密度可达~10^(15) cm^(-3)且与局域微波耦合能量密度呈正相关,而电子温度受外部条件的影响相对较小,激发态氩原子主要由类似沙哈平衡过程控制。Atmospheric pressure plasma discharges excited by the microwave surface wave are able to generate high-density plasmas in the region far away from the wave launcher,which is unnecessary to restrict the transmission of surface wave.Therefore,the processing efficiency and operability in the application of microwave induced plasmas are enhanced.By means of the optical emission spectroscopy,the electron density and electron temperature of plasmas are diagnosed by the Stark broadening of H_(α) line and line-to-continuum ratio methods,respectively.The variations of electron density and temperature during the discharge pulse with instantaneous power,modulated frequency and axial position are studied systematically.And the time evolution of line intensity of argon is observed.The influence of external working conditions on the electron density and temperature and the production mechanism of excited argon atoms during the post-discharge are discussed in detail.It is found that the electron density of plasma reaches up to~10^(15) cm^(-3),which is positively correlated to the microwave coupled energy density,but the electron temperature is less affected by the external conditions,since the argon atoms for excited levels are govern by the Saha-like balance.

关 键 词：大气压等离子体 表面波 发射光谱 放电参数 脉冲调制 

分 类 号：O531[理学—等离子体物理]