Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO_(3)modulator chip  

作　　者：Xuyang Wang He Jia Junhui Li Yumei Guo Yu Liu 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics,Institution of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]University of Chinese Academy of Sciences,Beijing 100049,China [3]Beijing Shiweitong Science&Technology Co.,Ltd.,Beijing 100176,China

出　　处：《Journal of Semiconductors》2022年第6期34-39,共6页半导体学报（英文版）

基　　金：This work was supported by National Key Research and Development Program of China(2018YFB2201101);the Strategic Priority Research Program of Chinese Academy of Sciences,Grant No.XDB43000000;Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z201100004020004。

摘　　要：In this work,a hybrid integrated optical transmitter module was designed and fabricated.A proton-exchanged Mach–Zehnder lithium niobate(LiNbO_(3))modulator chip was chosen to enhance the output extinction ratio.A fiber was used to adjust the rotation of the polarization direction caused by the optical isolator.The whole optical path structure,including the laser chip,lens,fiber,and modulator chip,was simulated to achieve high optical output efficiency.After a series of process improvements,a module with an output extinction ratio of 34 dB and a bandwidth of 20.5 GHz(from 2 GHz)was obtained.The optical output efficiency of the whole module reached approximately 21%.The link performance of the module was also measured.

关 键 词：optical transmitter module hybrid integration DFB laser chip LiNbO3 modulator chip 

分 类 号：TN40[电子电信—微电子学与固体电子学] TN248TN761