石墨烯基纳米复合薄膜及其摩擦学研究进展  

Research Progress on Tribology of Graphene-based Nanocomposite Films

作　　者：陈丽[1] 黄银 于元烈 CHEN Li;HUANG Yin;YU Yuanlie(School of Petrochemical Technology,Lanzhou University of Technology,Lanzhou 730050,China;Key Laboratory of Science and Technology on Wear and Protection of Materials,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China)

机构地区：[1]兰州理工大学石油化工学院,兰州730050 [2]中国科学院兰州化学物理研究所材料磨损与防护科技创新重点实验室,兰州730000

出　　处：《材料导报》2022年第11期77-84,共8页Materials Reports

基　　金：国家自然科学基金(51765036)。

摘　　要：微纳制造技术的快速发展推动着微电子机械系统(MEMS)的设计逐渐转向微型化、智能化和集成化。由于微构件尺寸减小、表面效应增强,粘着、纳米摩擦和磨损等问题严重影响着MEMS的可靠性和耐久性。因为微纳系统活动构件的间隙处于纳米量级,常规的液体润滑剂将导致摩擦副表面产生很大的粘滞力和剪切力,所以液体润滑剂不再适用于微纳系统。因此,通过表面改性,在微纳器件表面涂覆/沉积具有良好力学性能及化学稳定性的薄膜,成为提高微构件系统稳定性的有效手段。石墨烯具有优异的力学性能和结构刚性,同时具有低摩擦以及良好的化学稳定性,有望作为纳米润滑材料构筑石墨烯纳米润滑薄膜及石墨烯基纳米复合润滑薄膜,减小微纳尺度下接触表面的粘着、摩擦和磨损,提高MEMS的耐久性和稳定性。目前,在石墨烯和石墨烯基润滑薄膜的制备及其微纳摩擦学性能方面已取得了许多重要的研究结果。本文对近年来石墨烯纳米润滑薄膜和石墨烯基纳米复合润滑薄膜的制备进行了系统的梳理,并对其微纳摩擦学性能进行了总结和分析,提出了石墨烯基纳米复合薄膜作为润滑薄膜仍需解决的关键问题,并对石墨烯基纳米复合薄膜的发展趋势进行了展望。The rapid development of micro-nano manufacturing technology has greatly promoted the miniaturization,intellectualization,and integration of microelectromechanical systems( MEMS). The microscopic scale and enhanced surface effect cause serious adhesion,friction and wear,which seriously affect the reliability and durability of MEMS. Unfortunately,these miniaturized devices cannot be lubricated with conventional liquid lubricants,because the viscous force and shear stress dramatically increase in the nanoscale gaps between friction pairs. So,surface modification,creating films with excellent mechanical properties and chemical stability on the surface of miniaturized devices,is considered to be effective strategy to resolve the tribological problems of microdevices.Graphene exhibits good chemical stability,excellent mechanical and lubricating properties,which can be used to prepare graphene nano-lubricating films and graphene-based nanocomposite lubricating films. These films could improve the adhesion,stiction,and friction problems,and increase the stability and durability of MEMS. In recent years,many important results have been obtained on the preparation and micro-/nano-tribological properties of graphene lubricating films and graphene-based lubricating films.In this paper,the preparation of graphene nano-lubricating films and graphene-based nanocomposite lubricating films are systematically introduced,and the micro-/nano-tribological properties of these films are summarized. It is pointed out that the problem existed now and more efforts should be made with respect to the research on graphene-based nanocomposite lubricating films.

关 键 词：石墨烯 复合材料 润滑薄膜 纳米摩擦 

分 类 号：TQ127.11[化学工程—无机化工]