纳米级气体静压轴承回转误差测控系统软件开发  

Software development of measuring and controlling system for the rotation error of nano aerostatic bearing

作　　者：钱林弘 冯艳冰 张新疆[1] 雷大江[1] 蓝河 崔海龙[1] 郑越青[1] QIAN Linhong;FENG Yanbing;ZHANG Xinjiang;LEI Dajiang;LAN He;CUI Hailong;ZHENG Yueqing(Institute of Mechanical Manufacturing Technology,CAEP,Mianyang 621900,CHN)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《制造技术与机床》2022年第6期176-180,共5页Manufacturing Technology & Machine Tool

基　　金：国家重点研发计划(2020YFB2007600);中国工程物理研究院院长基金(YZJJLX2018010);国家自然科学基金(52075506);四川省科技计划项目(2021YJ0557);四川省科技计划项目(2021YJ0557)。

摘　　要：基于研制的纳米级气体静压轴承回转误差测试平台,采用C++与Matlab混合编程的方式,设计开发出纳米级气体静压轴承回转误差测控系统软件。该软件可实现运动控制、数据采集、数据处理及结果显示等功能。同时,该软件设计了一种角度误差控制方法,减小了在数据采集过程中引入的角度误差,从而得到了较为准确的主轴回转误差。调试结果表明,测控软件的功能合理,满足主轴回转误差测试精度和技术指标要求,采样角度误差可以控制在±0.01°以内,分离出的标准球圆度误差与标称值(36 nm)的相对误差低于6%。Based on the research of the tester applied to test the rotation error of nano aerostatic bearing,a software development of measuring and controlling system for the rotation error of nano aerostatic bearing is introduced in this paper.The software of the measurement and control system has been programmed mixed with C++and MATLAB,which can realize the functions of motion control,data acquisition,data processing and result display.At the same time,an angle error control method is designed to reduce the angle error introduced in the process of data acquisition,so as to obtain a more accurate spindle rotation error.The program debugging result shows that,the software capability of the test system is rational,and is satisfied the testing accuracy and qualification of the spindle rotation error,the sampling angle error can be controlled within±0.01°,and the relative error between the roundness error of reference artefact(test ball)and the nominal value(36nm)is less than 6%.

关 键 词：气体静压轴承 回转误差 测控系统软件 角度误差 

分 类 号：TH161.13[机械工程—机械制造及自动化]