AlSb薄膜的潮解机制研究  

Research on Deliquescence Mechanism of AlSb Films

作　　者：常璐 王朋伟 刘竞艳 苗壮 田弋纬 CHANG Lu;WANG Peng-wei;LIU Jing-yan;MIAO Zhuang;TIAN Yi-wei(Xi'an Hantang Analysis&Testing Co.,Ltd,Xi'an 710016,China)

机构地区：[1]西安汉唐分析检测有限公司,西安710016

出　　处：《西安文理学院学报（自然科学版）》2022年第2期100-103,共4页Journal of Xi’an University(Natural Science Edition)

摘　　要：锑化铝(AlSb)薄膜具有优良的光电特性,但因其极易潮解从而极大地限制了AlSb薄膜的应用.采用共溅射的方法制备AlSb薄膜,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)及俄歇电子能谱(AES)等表征了其镜头结构、形貌及成份等性质特征,并分析了其在空气中的潮解机制.实验表明AlSb薄膜在空气中潮解后在其表面存在有Al(OH)_(3),这说明AlSb与空气中水发生反应,并生成了Al(OH)_(3)和SbH_(3).通过研究AlSb薄膜潮解机制可以选择合适的方式对其潮解过程进行延缓甚至抑制.Aluminum antimonide(AlSb)film has excellent photoelectric properties,but its application is greatly limited because it is easy to deliquesce in air.In this paper,AlSb thin films were prepared by using the co-sputtering method.The lens structure,morphology and composition of AlSb film were characterized by using X-ray diffraction(XRD),scanning electron microscope(SEM)and auger electron spectroscopy(AES),and the deliquescence mechanism of AlSb film in air was analyzed.The experimental results show that Al(OH)_(3) exists on the surface of AlSb film after its deliquescence in air,which indicates that AlSb reacts with water in air and generates Al(OH)_(3)and SbH_(3).By studying the deliquescence mechanism of AlSb film in air,an appropriate way can be selected to delay or even inhibit its deliquescence process.

关 键 词：ALSB 潮解 AES XRD SEM 

分 类 号：O641[理学—物理化学] O647[理学—化学]