基于介质上电润湿的微流控多功能器件  

Microfluidic Multifunctional Device based on Electrowetting-on-Dielectric

作　　者：蒙列 万静 袁文志 陈一净 朱旭 MENG Lie;WAN Jing;YUAN Wen-zhi;CHEN Yi-jing;ZHU Xu(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210046,China)

机构地区：[1]南京邮电大学,电子与光学工程学院、微电子学院,南京210046

出　　处：《光通信研究》2022年第3期50-54,共5页Study on Optical Communications

基　　金：万静自然学科横向科研发展基金资助项目(HJ1060319960015)。

摘　　要：文章提出了一种微流控多功能器件,利用介质上电润湿(EWOD)效应灵活改变进光能量,可实现可变光圈、可变光衰减器和光开关等多个功能。其具有结构简单、体积小、操作简便、应用广且灵活和成本低等优点。文章分析讨论了所提微流控多功能器件的光学特性并做了结构优化。研究结果表明,所提微流控多功能器件的插入损耗很小,仅为0.014 dB;液体可变光圈的通光孔径变化范围为0~0.506 mm;可变光衰减器理论上具有0~100%的可变衰减范围,外加91.1 V电压时的衰减量为40.2 dB;微流控光开关无电压时处于“关”状态,外加电压大于135 V时,处于“开”状态。This paper presents a microfluidic multifunctional device,which can flexibly change the light input energy by using the effect of Electrowetting-on-Dielectric(EWOD).It can also realize multiple functions of variable aperture,variable optical attenuator and optical switch.The utility model has the advantages of simple structure,small volume,simple operation,wide application,flexibility and low cost.In this paper,the optical characteristics of the proposed microfluidic multifunctional device are analyzed and discussed,and the structure is optimized.The results show that the insertion loss of the proposed microfluidic multifunctional device is as small as only 0.014 dB.The aperture of the liquid variable aperture varies from 0 to 0.506 mm.In theory,the variable optical attenuator has a variable attenuation range of 0~100%,and the attenuation can reach 40.2 dB when the applied voltage is 91.1 V.The state microfluidic optical switch is"off"when there is no applied voltage and the state is"on"when the applied voltage is greater than 135 V.

关 键 词：微流控光学 介质上电润湿 可变光圈 可变光衰减器 光开关 

分 类 号：O4361.1[机械工程—光学工程]