高温ITO薄膜应变计结构参数影响研究  

Investigation of Structure Parameters on the Properties of ITO Film Strain Gauge at High Temperatures

作　　者：李剑 刘志春 周浩 李强[3] 赵鑫 梁军生[1,2] 王立鼎[1,2] Li Jian;Liu Zhichun;Zhou Hao;Li Qiang;Zhao Xin;Liang Junsheng;Wang Liding(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China;Key Laboratory of Hypersonic Aerodynamic Force and Heat Technology,AVIC Aerodynamics Research Institute,Shenyang 110034,China)

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024 [2]大连理工大学精密与特种加工技术教育部重点实验室,辽宁大连116024 [3]中国航空工业空气动力研究院高超声速气动力/热重点实验室,辽宁沈阳110034

出　　处：《航空科学技术》2022年第5期69-75,共7页Aeronautical Science & Technology

基　　金：航空科学基金(2019ZD063001);高超声速气动力/热重点实验室基金。

摘　　要：以氧化铟锡(ITO)为敏感材料制备的高温薄膜应变计被广泛应用于航空发动机涡轮叶片等热端部件应变测试。为了探究高温ITO薄膜应变计结构参数对其应变灵敏度系数(GF)的影响,采用正交试验法设计了不同敏感栅长度、不同敏感栅数量的高温ITO薄膜应变计,通过仿真分析以及试验验证的方法系统研究了应变计在25℃、600℃、800℃和900℃的差别。结果表明,应变计GF随敏感栅长度的增加而变大,随敏感栅数量的增加而先增大后减小(最优中间值为6栅),最终获得敏感栅长度5mm、敏感栅数量6栅为最佳结构参数,以最佳结构参数制备的高温ITO薄膜应变计在不同温度下的GF均保持在3.2左右。研究结果对高温ITO薄膜应变计的高温性能优化有一定的指导意义。The ITO thin film strain gauge(TFSG)has been widely used in the strain measurement of hot sections including high temperature turbine blades of aeroengines.In order to explore the effect of the structural parameters on the gague factor(GF)of the ITO TFSG,different grid lengths and the number of the sensitive grid in the ITO TFSGs are developed,and their pezoresistive performance are also systematically studied at 25℃,600℃,800℃and 900℃.Results show that the GF of the ITO TFSGs initially increases and then decreases with the increase of the number of the sensitive grid.The GF of the ITO TFSGs grows with the enhancement of the length.Consequently,the optimal structural parameters of 5mm sensitive grid length and 6 sensitive grids are obtained.Moreover,the pezoresistive response of the ITO TFSG prepared with the optimal structural parameters is recorded,and the GF is about 3.2 at different temperatures.The results have a certain guiding significance for the high-temperature performance optimization of ITO TFSGs.

关 键 词：ITO 应变计 高温 航空发动机 GF 

分 类 号：V241.7[航空宇航科学与技术—飞行器设计]