载荷、摩擦副及介质环境对多层Ti掺杂类石墨薄膜的摩擦学行为影响  

Effect of Load,Friction Pair and Medium Environment on the Tribological Behavior of Multilayer Ti-doped Graphite-like Carbon Films

作　　者：史相如 史耘嘉 张欣[1] 周泽华[1] 王泽华[1] 陈坚[3] SHI Xiangru;SHI Yunjia;ZHANG Xin;ZHOU Zehua;WANG Zehua;CHEN Jian(College of Mechanics and Materials,Hohai University,Nanjing 211100,China;Ocean and Offshore Engineering Research Institute,Hohai University,Nantong 226019,China;School of Materials Science and Engineering,Southeast University,Nanjing 211100,China)

机构地区：[1]河海大学力学与材料学院,南京211100 [2]南通河海大学海洋与近海工程研究院,南通226019 [3]东南大学材料科学与工程学院,南京211100

出　　处：《中国表面工程》2022年第1期191-200,共10页China Surface Engineering

基　　金：中央高校基本科研业务费(B200201068);南通市市级科技计划(JC2020088);江苏省自然科学青年基金(BK20210374);江苏省双创博士(JSSCBS20210254)资助项目。

摘　　要：针对非晶碳基薄膜高内应力和低膜基结合强度的问题,采用闭合场非平衡磁控溅射系统在316L不锈钢基体上制备多层结构掺杂类石墨薄膜(GLC),探究载荷、摩擦副和介质环境对薄膜摩擦学行为的影响。结果表明,制备得到的多层结构GLC薄膜结构致密均匀,膜基之间没有明显缺陷,且力学性能良好。薄膜在干摩擦条件下的摩擦因数曲线呈明显的三阶段特征,分别对应于轻微的磨粒磨损、薄膜的剥离以及对磨球上碳质转移膜的形成。薄膜的平均摩擦因数随载荷的增加而显著提高,磨损率呈先减小后增大的趋势。相对于ZrO_(2)陶瓷球,Si_(3)N_(4)陶瓷球因其较高的黏着倾向和较大的赫兹接触半径导致其较高的摩擦因数和磨损率。GCr15金属球因其较低的硬度,导致碳质转移膜随金属磨削的剥离而脱落,造成相对较高的摩擦因数和磨损率。相对于室温空气环境下,GLC薄膜在NaCl溶液中由于受到水溶液的冲洗和腐蚀介质Cl^(-)的侵蚀,导致薄膜从基体的快速剥离,造成更高的摩擦因数和磨损率。研究成果可为提高非晶碳基薄膜在不同工作环境下的服役寿命和使用效率提供理论指导。In order to solve the problem of high internal stress and low adhesion strength of amorphous carbon films,multilayer doped graphite-like carbon(GLC)films are prepared on 316L stainless steel substrate by closed field unbalanced magnetron sputtering system.The effect of load,friction pair and medium environment on the tribological behavior of GLC film are investigated by ball-on-disc rotary friction tester.The results show that the multilayer GLC film has compact and uniform structure without obvious defects between the film and substrate,and shows excellent mechanical properties.The friction factor curves of the film under dry friction condition show obvious three-stage characteristics,corresponding to slight abrasive wear,film peeling and the formation of carbon transfer film on the mating balls.The average friction factor of the film increases significantly with the increase of normal load,while the wear rate decreases first and then increases.Compared with ZrO_(2)ceramic ball,Si_(3)N_(4)/GLC friction pair has higher friction factor and wear rate due to its higher adhesion tendency and larger Hertz contact radius.Due to its low hardness,GCr15metal ball causes the carbon transfer film to fall off with the stripping of metal grinding,resulting in relatively high friction factor and wear rate.Compared with the ambient air environment,GLC film is washed by aqueous solution and eroded by corrosive medium Cl^(-)in NaCl solution,resulting in rapid stripping of the film from the substrate,resulting in higher friction factor and wear rate.The results provide a theoretical guidance for improving the service life and working efficiency of amorphous carbon films in different environments.

关 键 词：类石墨薄膜 载荷 摩擦副 介质环境 磨损机理 

分 类 号：TG156[金属学及工艺—热处理] TB114[金属学及工艺—金属学]