蓝光垂直腔面发射激光器的结构优化  

Structure Optimization of Blue Vertical Cavity Surface Emitting Laser

作　　者：黄晶 杨辉[1] 陈鹏 Huang Jing;Yang Hui;Chen Peng(Shangrao Vocational&Technical College,Shangrao 334109,Jiangxi,P.R.China)

机构地区：[1]上饶职业技术学院,江西上饶334109

出　　处：《灯与照明》2022年第1期52-54,共3页Light & Lighting

摘　　要：GaN基垂直腔面发射激光器(VCSEL)的制备技术尚未成熟,其产生激光激射需使3个波长对准,即制备的分布式布拉格反射镜(Distributed Bragg Reflector,DBR)决定的谐振波长、制备的腔长度决定的谐振波长、有源区量子阱InGaN的In掺杂浓度决定的蓝光发光波长。如果以上3个波长对准差,激光输出将大幅度衰减。借助辅助软件对GaN基蓝光垂直腔面发射激光器的分布式布拉格反射镜的周期和膜厚、腔长膜厚作细致的理论研究,得到分布式布拉格反射镜周期数不同、DBR膜厚偏差、腔长膜厚偏差情况下的GaN基蓝光垂直腔面发射激光器的激光输出差异。The preparation technology of GaN-based VCSELs is not yet mature.The main reason is that three wavelengths need to be aligned to generate laser,that is,the resonance wavelength determined by the prepared distributed Bragg reflector,the resonance wavelength determined by the prepared cavity length,and the blue light emission wavelength determined by the In doping concentration of the quantum well InGaN in the active region.If the three wavelengths are misaligned,the laser output will be greatly droop.In this paper,with the help of auxiliary software,the period and film thickness of the distributed Bragg reflector of GaN-based blue vertical cavity surface emitting laser,and the film thickness of the cavity length have been studied in detail.The difference of laser output of GaN-based blue-light vertical cavity surface emitting laser under the condition of thickness deviation and cavity length and film thickness deviation.

关 键 词：垂直腔面发射激光器 光学谐振腔 布拉格反射镜 受激辐射 输出光谱 

分 类 号：TN248[电子电信—物理电子学]