聚二甲基硅氧烷柔性基材上应力-激光复合制备直角微沟槽  

Stress-Laser Composite Fabrication of Right-Angle Microgrooves on Polydimethylsiloxane Flexible Substrate

作　　者：谢凯武 李泽斌 邓宇[1] 张璆 钟世裕 蔡俊劲 常磊鑫 Kaiwu Xie;Zebin Li;Yu Deng;Qiu Zhang;Shiyu Zhong;Junjin Cai;Leixin Chang(School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《高分子材料科学与工程》2022年第3期106-112,121,共8页Polymer Materials Science & Engineering

基　　金：国家自然科学基金资助项目(500180089);广州市基础与应用研究项目(202102020447);“攀登计划”专项基金(pdjh2021b0155)。

摘　　要：聚二甲基硅氧烷(PDMS)是一种应用广泛的柔性材料。文中在PDMS表面制备了直角微沟槽,分析了直角微沟槽的形貌。结合PDMS的柔性特点,开展了预应力下纳秒激光制备PDMS表面直角微沟槽实验。结果表明,微沟槽两侧的微裂纹随着激光扫描速度的增大(100~600 mm/s)开始出现随后逐渐变小,微沟槽的几何形貌随扫描速度发生改变,其深度最大值为43.14μm、最小值为8.41μm,其宽度最大值为111.41μm、最小值为16.18μm,且直角微沟槽的内外侧形貌存在差异;调整预应力角度可以调控微沟槽两侧微裂纹的走向、微沟槽的几何形貌和扫描路径的偏移。应力辅助是一种调控表面形貌,辅助PDMS表面微纳加工实现功能化的简便方法。Polydimethylsiloxane(PDMS)is a widely used flexible material.In this paper,right-angled microgrooves were prepared on the surface of PDMS,and the morphologies of the right-angled microgrooves were analyzed.Combining with the flexible characteristics of PDMS,the experiment of preparing right-angle micro grooves on PDMS surface by nanosecond laser under prestress was carried out.The experimental results show that as the laser scanning speed increases(100~600 mm/s),the micro-cracks on both sides of the micro-groove begin to appear and then gradually become smaller.The geometric morphology of the micro-groove changes with the scanning speed,and the maximum width is 43.14μm,the minimum width is 8.41μm,the maximum width is 111.41μm,and the minimum width is 16.18μm,and there are differences in the morphology of the inner and outer sides of the right-angle microgroove;adjusting the prestress angle can control the direction of the microcracks on both sides of the microgrooves,the geometry of the microgrooves and the offset of the scanning path.Stress-assisted is a simple and convenient method to control surface morphology and assist PDMS surface micro-nano processing to realize functionalization.

关 键 词：应力辅助 纳秒激光加工 微裂纹调控 表面形貌 微沟槽 

分 类 号：TN492[电子电信—微电子学与固体电子学]