二维材料解理技术新进展及展望  

New progress and prospects of mechanical exfoliation technology of two-dimensional materials

作　　者：黄新玉 韩旭 陈辉 武旭[1,2] 刘立巍 季威 王业亮[1,2] 黄元 Huang Xin-Yu;Han Xu;Chen Hui;Wu Xu;Liu Li-Wei;Ji Wei;Wang Ye-Liang;Huang Yuan(Advanced Research Institute of Multidisciplinary Sciences,Beijing Institute of Technology,Beijing 100081,China;MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices,School of Integrated Circuits and Electronics,Beijing Institute of Technology,Beijing 100081,China;School of Materials Science and Engineering,Beijing Institute of Technology,Beijing 100081,China;Department of Physics,Renmin University of China,Beijing 100872,China)

机构地区：[1]北京理工大学,前沿交叉科学研究院,北京100081 [2]北京理工大学,集成电路与电子学院,北京100081 [3]北京理工大学,材料科学与工程学院,北京100081 [4]中国人民大学,物理系,北京100872

出　　处：《物理学报》2022年第10期382-391,共10页Acta Physica Sinica

基　　金：科技部国家重点研发计划(批准号:2019YFA0308000,2018YFA0704201);国家自然科学基金(批准号:62022089,92163206,61725107,11874405);重庆市杰出青年基金(批准号:2021ZX0400005)。

摘　　要：自从2004年首次制备出石墨烯以来,机械解理技术被广泛用于制备过渡金属二硫族化合物、黑磷等各种二维材料.在多种二维材料制备技术中,机械解理技术具有制备方法简单、普适性好等优点,最重要的是解理得到的晶体质量高,是研究很多新奇物性的理想选择.本文介绍了机械解理技术的产生背景,总结了常规机械解理技术在二维材料研究过程中的瓶颈.为了解决常规机械解理技术制备效率低、样品尺寸小的问题,一些新型机械解理技术近年来不断发展起来,如氧气等离子体辅助法和金膜辅助法等.作为自上而下的二维材料制备方法,新的解理技术在未来二维材料基础研究和应用中仍然充满生机.未来解理技术将朝更大尺寸,更高质量方向发展.Since the monolayer graphene was first obtained in the year of 2004,mechanical exfoliation technique has been widely used to prepare various two-dimensional materials such as transition metal dichalcogenides and black phosphorus.Among a variety of preparation techniques of two-dimensional materials,mechanical exfoliation technique shows advantages in its simplicity and universality.More importantly,the exfoliated twodimensional samples are the ideal ones for many novel phenomena.This paper introduces the background of mechanical exfoliation technique and summarizes the problems of conventional mechanical exfoliation technique in the development of two-dimensional materials.In order to solve the problems of low efficiency and small sample size of conventional mechanical exfoliation technique,some modified mechanical exfoliation techniques have been developed,such as oxygen-plasma-assisted exfoliation method and gold-film-assisted exfoliation method.As a commonly used “top-down” preparation method,the new exfoliation technology is still full of vitality in basic research and application of two-dimensional materials.In the future,larger size and higher quality will be the development direction of exfoliation technology.

关 键 词：二维材料 机械解理 石墨烯 二硫化钼 

分 类 号：TB34[一般工业技术—材料科学与工程]