电热微夹持器微尺度传热分析与优化设计  

Analysis on the Microscale Heat Transfer and Optimized Design of Electrothermal Microgripper

作　　者：林琳[1,2] 杨国舜[3] 武灏 申浩 陈立国 LIN Lin;YANG Guoshun;WU Hao;SHEN Hao;CHEN Liguo(Robotics and Microsystems Center,Soochow University Suzhou,215021,China;Marine Institute of Mechanical and Electrical Engineering,Xiamen Ocean Vocational College Xiamen,361012,China;Aerospace Engineering Equipment(Soochow)Co.,Ltd.Suzhou,215100,China)

机构地区：[1]苏州大学机器人与微系统研究中心,苏州215021 [2]厦门海洋职业技术学院海洋机电学院,厦门361012 [3]航天工程装备(苏州)有限公司,苏州215100

出　　处：《振动．测试与诊断》2022年第3期462-467,614,共7页Journal of Vibration,Measurement & Diagnosis

基　　金：国家重点研发计划资助项目(2018YFB2002900)。

摘　　要：针对电热平行梁微夹持器存在的末端夹指高温问题,首先,对电热微夹持器的传热机理进行分析,结合实验得到微尺度下的拟合传热参数;其次,对传统的电热微夹持器末端夹指设计了S型梁散热结构,使用显微红外分析仪对微夹持器对优化效果进行表征;最后,通过微球夹持实验验证了优化设计的可靠性。结果表明,空气自然对流换热系数可达到宏观状态下的60~300倍,在此数据基础上进行的优化设计可以使末端夹指温度降低约45%。该优化方案对其他材料或结构的电热微夹持器也具有一定的通用性。Electrothermal microgripper is a typical execution unit in MEMS micro operation systems. But influenced by the drive mode,parallel-beam electro-thermal microgripper suffers the problem of high temperature at the tip clamping fingers,which may seriously restrict the scope of application. To solve this problem,an analysis on the heat transfer effect is carried out for optimizing the design. Since feature sizes of electro-thermal microgripper is far smaller than the routine and few studies are conducted on micro-scale heat transfer characteristics of electrothermal microgripper,the heat transfer mechanism of electrothermal microgripper is analyzed first to obtain the fitting heat transfer parameters at microscale by experiments. Then,a heat dissipation structure with an S-shaped beam is designed for traditional tip clamping fingers of electro-thermal microgripper,and the optimized effect of the micro gripper is characterized with a micro-infrared analyzer. Finally,the reliability of the optimized design is verified through microsphere gripping experiment. The results show that the heat transfer coefficient of natural air convection is 60 to 300 times than that in macro state. The optimized design based on this can reduce the temperature of tip clamping fingers by about 45%. The proposed optimization scheme is applicable to electro-thermal microgripper of other materials or structures.

关 键 词：电热微夹持器 尺度效应 传热参数 温度场 结构优化 

分 类 号：TN302[电子电信—物理电子学] TH39[机械工程—机械制造及自动化]