基于液晶的太赫兹可调谐超材料吸波体  

Electrically Tunable Terahertz Metamaterial Absorber Based on Liquid Crystal

作　　者：史添 徐俊杰 孙双元 殷明君 杨军[1] 尹治平[1] SHI Tian;XU Junjie;SUN Shuangyuan;YIN Mingjun;YANG Jun;YIN Zhiping(Academy of Opto-electric Technology,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学光电技术研究院,安徽合肥230009

出　　处：《电子科技》2022年第6期43-47,共5页Electronic Science and Technology

基　　金：国家自然科学基金(61871171)。

摘　　要：文中设计了一种液晶太赫兹电控超材料吸波体,通过外部电场改变液晶层的等效介电常数,实现对于太赫兹反射波的调控。对器件的传输性能进行计算,分析了谐振频点处的表面电流分布和能量损耗密度情况。采用紫外光刻以及湿法刻蚀技术,制作了30×30单元超材料吸波体阵列并对其进行测试验证。结果表明,当偏置电压在0~30 V之间变化时,吸波体的谐振频点可实现101.5~117.95 GHz范围内的动态调控,综合可调率达到13.9%,整个工作频段内,吸收率始终维持在90%以上。A liquid crystal terahertz electronically controlled metamaterial absorber is designed to change the equivalent dielectric constant of the liquid crystal layer to realize the regulation of the terahertz reflected wave through an external electric field.The transmission performance of the device is calculated,and the surface current distribution and energy loss density at the resonance frequency are analyzed.By using ultraviolet lithography and wet etching technology,a 30×30 unit metamaterial absorber array is fabricated and verified.The results show that when the bias voltage is changed between 0 and 30 V,the resonance frequency of the absorber can be dynamically adjusted in the range of 101.5 to 117.95 GHz,and the comprehensive adjustable rate can reach 13.9%.In the working frequency band,the absorptivity of the proposed absorber is higher than 90%.

关 键 词：太赫兹 超材料 吸波体 液晶 电调谐 吸收率 紫外光刻 介电常数 

分 类 号：TN99[电子电信—信号与信息处理]