热熔融自回流方法制备硫化物玻璃非线性集成光学波导(特邀)  

Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling(Invited)

作　　者：齐人铎 翟彦芬 张巍(指导) 黄翊东 QI Renduo;ZHAI Yanfen;ZHANG Wei;HUANG Yidong(Beijing National Research Center for Information Science and Technology(BNRist),Beijing Innovation Center for Future Chips,Frontier Science Center for Quantum Information,Electronic Engineering Department,Tsinghua University,Beijing 100084,China;Silicon Austria Labs GmbH,A 9524 Villach,Austria;Beijing Academy of Quantum Information Sciences,Beijing 100193,China)

机构地区：[1]清华大学电子工程系,量子信息前沿科学中心,北京市未来芯片技术高精尖创新中心,北京信息科学与技术国家研究中心,北京100084 [2]奥地利半导体实验室,A 9524 Villach,Austria [3]北京量子信息科学研究院,北京100193

出　　处：《光子学报》2022年第5期46-59,共14页Acta Photonica Sinica

基　　金：北京市自然科学基金(No.Z180012);国家重点研发计划(No.2018YFB2200400);国家自然科学基金(Nos.61875101,91750206);北京量子信息科学研究院项目(No.Y18G26);清华大学自主科研项目。

摘　　要：硫化物玻璃是发展非线性集成光学器件的良好材料,特殊的理化特性使得硫化物玻璃集成光学波导的制备成为研究的难点。对硫化物玻璃波导的制备工艺进行了综述,重点介绍利用硫化物玻璃在熔融状态下流动性好的特点,采用热熔融自回流方法制备硫化物玻璃波导的工艺。该方法避免了对硫化物玻璃薄膜完整性的破坏,以及光刻胶显影液对硫化物玻璃材料的腐蚀作用,可以得到高质量的具有小模场面积的倒脊型硫化物玻璃波导。实验测试表明,采用热熔融自回流方法制备的硫化物玻璃波导具有良好的三阶非线性光学特性和受激布里渊散射特性。最后,展望了采用该方法发展硫化物玻璃非线性集成光学器件及其片上系统的研究方向和前景。Chalcogenide Glasses(ChGs)is a class of inorganic glass formed by covalent bonding of one or more chalcogens(sulfur,selenium and tellurium,but excluding oxygen)and other elements(such as arsenic,germanium and stibium).ChGs are important materials to develop nonlinear integrated photonic devices,since they have many good characteristics as nonlinear optical materials,such as high the thirdorder nonlinearity,low two-photon absorption and good performance on stimulated Brillouin scattering.However,waveguides and other integrated devices based on ChGs are not easy to be fabricated due to their physical and chemical characteristics.Hence,the fabrication technology is crucial for the development of ChG nonlinear integrated photonic devices.In this paper,a comprehensive review on current fabrication technologies of ChG integrated optical waveguide structures is provided firstly,including wet etching,dry etching,lift-off,spinning coating of ChG solution,hot Embossing and so on.Then a fabrication method based on hot melt smoothing and micro-trench filling of ChGs is introduced in detail,which was proposed and developed by our laboratory.The processing of this fabrication method is as follows.Step one,a microtrench is fabricated in a silica substrate by photolithography and dry etching or wet etching.Step two,the ChG film is deposited on the substrate by thermal evaporation or sputtering.Step three,the chip is annealed at the proper temperature,during which the ChG is melted and flows to the trench,leading to a reverse ridge waveguide structure.Experiment result showed that the measured waveguide sample has a low transmission attenuation of 0.74 dB/cm in its quasi-TE mode.This method also could be used to fabricate ChG micro-ring resonators.The measured resonator sample had good performance with a resonance quality factor of 180000.Nonlinear optical properties of ChG waveguides fabricated by this method were also demonstrated experimentally.The third-order nonlinearity was demonstrated by the experiment of stimulated four-

关 键 词：硫化物玻璃 非线性光学器件 集成光学波导 三阶光学非线性 受激布里渊散射 

分 类 号：TN256[电子电信—物理电子学]