波长间隔为3.2nm的电光调制和波分复用集成器件研究  

An Integrated Device for Electro-optic Modulation and Wavelength Division Multiplexing with the Wavelength Channel Spacing of 3.2nm

作　　者：王水柔 陈鹤鸣(指导) 刘雪[1] 潘万乐 WANG Shuirou;CHEN Heming;LIU Xue;PAN Wanle(College of Electronic and Optical Engineering&College of Flexible Electronics(Future Technology),Nanjing University of Posts and Telecommunications,Nanjing 210023,China;Bell Honors School,Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院、柔性电子(未来技术)学院,南京210023 [2]南京邮电大学贝尔英才学院,南京210023

出　　处：《光子学报》2022年第5期189-201,共13页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61571237);江苏省自然科学基金(No.BK20151509)。

摘　　要：提出了一种基于光子晶体电光调制和波分复用的集成器件。该集成器件的电光调制器模块和波分复用器模块均采用一维光子晶体纳米梁腔结构。利用三维时域有限差分法进行仿真。结果表明,该器件可实现工作波长为1550.4 nm和1553.6 nm的电光调制和波分复用功能。该器件在工作波长1550.4 nm和1553.6 nm下的插入损耗分别为0.89 dB和0.40 dB,消光比分别为17.13 dB和22.52 dB,调制深度分别为0.98和0.99,信道串扰分别为-24.20 dB和-23.37 dB,器件尺寸仅为71.34μm×7.8μm×0.22μm。该集成器件结构紧凑,易于集成,可望应用于光互连网络和数据中心。In recent years,the internet has been used in almost every aspect of life,and the demands for communication capacity and transmission speed are increasing.The unit device technology has basically matured,but how to maintain the good performance of unit devices and place multiple devices on the same chip to solve the bottleneck of the current communication system is still under study.Nowadays,electrooptical modulators and wavelength division multiplexers with various structures have been proposed.Research on these two types of single devices has become increasingly mature,but there are few studies on silicon-based optoelectronic integration that integrating the two devices to achieve multiple functions,which means more research on integrated devices is still needed.Considering the requirements of optical inter-connected networks and data centers for small size,large bandwidth and integration,we propose an on-chip integrated device for electro-optic modulation and wavelength division multiplexing.The two devices are cascaded together using silicon waveguides,which has the characteristics of small size,small modulation voltage,low insertion loss,low channel crosstalk and large modulation depth.In this paper,an integrated device based on photonic crystal nanobeam cavity electro-optical modulator and wavelength division multiplexer is proposed.Both the electro-optical modulator module and the wavelength division multiplexer module are composed of a one-dimensional photonic crystal nanobeam cavity.The integrated device consists of nanowire silicon waveguide,one-dimensional photonic crystal nanobeam cavity,Al electrode,and silicon dioxide cladding.Among them,the nanowire silicon waveguide,the one-dimensional photonic crystal nanobeam cavity,and the Al electrode are located in the silicon dioxide cladding.The whole integrated device can realize the"on"and"off"state modulation of different wavelengths of the electro-optical modulation module and download different wavelengths through the wavelength division multiplexing m

关 键 词：光子晶体 纳米梁腔 纳米线波导 电光调制器 波分复用器 

分 类 号：TN256[电子电信—物理电子学]