基于等离子体处理的微纳复合结构制备及其OLED光提取性能研究  

Fabrication of Hybrid Micro-nano Structures Based on Plasma Treatment and Its Light Extraction Performances for OLED

作　　者：洪德铭 陈桂雄 王文雯 赵金威 周雄图(指导)[1,2] 张永爱 吴朝兴[1,2] 郭太良 HONG Deming;CHEN Guixiong;WANG Wenwen;ZHAO Jinwei;ZHOU Xiongtu;ZHANG Yongai;WU Chaoxing;GUO Tailiang(College of Physics and Information Engineering,Fuzhou University,Fuzhou 350116,China;Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350116,China;School of Advanced Manufacturing,Fuzhou University,Quanzhou,Fujian 362200,China)

机构地区：[1]福州大学物理与信息工程学院,福州350116 [2]中国福建光电信息科学与技术创新实验室,福州350116 [3]福州大学先进制造学院,福建泉州362200

出　　处：《光子学报》2022年第5期228-236,共9页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61775038);福建省自然科学基金(No.2021J01577);闽都创新实验室自主部署项目(No.2021ZZ130)。

摘　　要：通过光刻工艺和热熔法,制备了形貌均匀、尺寸可控的微透镜阵列,通过反应离子刻蚀技术制备用于改善光提取性能的纳米光栅结构,成功制备出高效光提取的微透镜/纳米光栅组合的微纳复合结构。研究了等离子体处理对纳米光栅形貌的影响规律、纳米光栅的形成机理以及微透镜/纳米光栅微纳复合结构光提取性能。实验结果表明,通过改变等离子体处理工艺条件,可实现纳米光栅周期与深度的调控,从而得到不同尺寸的微透镜/纳米光栅复合结构。当微透镜高度约为19.6μm,纳米光栅尺寸约为周期600±50 nm、深度20±5 nm时,微透镜/纳米光栅微纳复合结构可以在不改变绿光有机电致发光二极管器件电学特性的前提下,有效提高有机电致发光二极管器件的外量子效率,比单纯的有机电致发光二极管器件提高33%。Organic Light-emitting Diodes(OLEDs)have been extensively researched due to their meaningful advantages in terms of Self-luminous,wide viewing angle and low power as a new display technology.Thus,OLEDs are considered to be one of the next-generation mainstream display technologies and have a higher and higher penetration rate in the display terminal and lighting fields.However,OLEDs still have technical problems such as external quantum efficiency and poor stability,which severely limit the further development of OLEDs.Therefore,improving the light efficiency of OLED devices is the key to its application in the field of lighting and display.In OLED devices,most of the photons generated by the recombination of excitons are captured by the total internal reflection at the interface between the air and the substrate.Therefore,there is still much room for improvement in the light coupling efficiency of OLED devices in terms of increasing energy efficiency.By integrating high-efficiency optical extraction structures the device,improving the light efficiency of OLEDs has become a key concern in this field.The light extraction includes internal light extraction method and external light extraction method.Among them,the external light extraction method can not affect the electrical characteristics of devices,and has the advantages of simple process and low cost.As an external light extraction method,microlens array can improve the light efficiency of the devices.However,the microlens array is a micronsized structure,and the effect of the light extraction is not excellent enough.In recent years,a nanogratings structure has received extensive attention and research on its fabrication process and light extraction performance because it can change the direction of light and suppress the total reflection.In this paper,A microlens/nanogratings hybrid structure in order to improve the light efficiency of OLED devices is proposed.The main research contents and results are as follows:1)Microlens arrays with the uniform morphology

关 键 词：有机电致发光二极管 微纳复合结构 光提取效率 纳米光栅 微透镜阵列 等离子体处理 

分 类 号：O435.1[机械工程—光学工程]