低温流量测量与标定系统的研制  

Development of the cryogenic flow measurement and calibration system

作　　者：董相文 孙启迪[1,2] 苏玉磊 周家屹 张俊峰[1,2] 叶海峰 丁怀况 Dong Xiangwen;Sun Qidi;Su Yulei;Zhou Jiayi;Zhang Junfeng;Ye Haifeng;Ding Huaikuang(The 16th Institute of China Electronics Technology Group Corporation,Hefei 230088,China;Anhui Vacree Technologies Co.Ltd.,Hefei 230088,China)

机构地区：[1]中国电子科技集团公司第十六研究所,合肥230088 [2]安徽万瑞冷电科技有限公司,合肥230088

出　　处：《低温与超导》2022年第2期78-83,共6页Cryogenics and Superconductivity

基　　金：科学技术部科技型中小企业技术创新基金(13C26213402783)资助。

摘　　要：为了满足低温流量计的标定校准需求,研制了一套低温流量测量与标定系统;按照要求进行了系统的整体流程及工作模式设计,同时对其中的过冷换热器及液氮泵进行了设计计算及选型;考虑到后期系统的功能扩展,用来进行多种泵的流量特性测试,选取了潜液泵作为动力源及配备了单独的外置泵池;系统采用了标准表法与称重法,配合两套过冷箱,最终实现了液氮流量9.2~102 L/min范围内对低温流量计进行瞬时及累计流量的标定校准,校准误差为1.84‰,满足系统的设计要求。Based on the requirements of cryogenic flowmeter calibration, a cryogenic flow measurement and calibration system was developed.The working mode of the system was set according to the requirements, and the subcooled heat exchanger and liquid nitrogen pump were designed, calculated and selected.Considering the function expansion of the system in the future such as measuring the flow rates of various pumps, a submersible pump was selected as the power source and a separate external pump pool was equipped.The master meter method and weighing method were adopted to realize the calibration of instantaneous and cumulative flow of cryogenic flowmeter.The flow range of liquid nitrogen is 9.2 to 102 L/min and the calibration accuracy is 1.84 ‰,which meet the design requirements of the system.

关 键 词：过冷液氮 低温流量计 标定校准 泵流量特性 

分 类 号：TB657.5[一般工业技术—制冷工程]