四氯金酸修饰的单壁碳纳米管室温气体传感器  

Room-Temperature Gas Sensor of Single-Walled Carbon Nanotube Modified by Chloroauric Acid

作　　者：田阗 马德福 尹欢 朱明奎 苏言杰 Tian Tian;Ma Defu;Yin Huan;Zhu Mingkui;Su Yanjie(Key Laboratory for Thin Film and Microfabcrication Technology of the Ministry of Education,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学电子信息与电气工程学院薄膜与微细技术教育部重点实验室,上海200240

出　　处：《微纳电子技术》2022年第5期417-423,457,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(62171275)。

摘　　要：通过四氯金酸(HAuCl_(4))对(6,5)手性的半导体性单壁碳纳米管(sc-SWCNT)进行Au修饰,并基于纳米复合材料制备了室温二氧化氮(NO_(2))气体传感器。通过扫描电子显微镜(SEM)、能量色散X射线光谱仪及Raman光谱仪对修饰后的sc-SWCNT材料进行微观形貌和元素含量的分析和表征,结果表明HAuCl_(4)成功复合到sc-SWCNT表面上。气敏测试结果表明,HAuCl_(4)修饰的sc-SWCNT气体传感器表现出了更高的响应值和更低的检出限,其对体积分数为1×10^(-6)的NO_(2)的响应值为1.25,是纯sc-SWCNT气体传感器的1.47倍,对NO_(2)的体积分数检出限达到了2.4×10^(-9),并且在气体的选择性和重复性上表现优异。同时HAuCl_(4)修饰的sc-SWCNT气体传感器也展现了出色的长期稳定性。(6,5)-chiral semiconducting single-walled carbon nanotubes(sc-SWCNTs)were modified with Au by chloroauric acid(HAuCl_(4)),and a NO_(2)room-temperature gas sensor was fabricated based on the nanocomposite material.The micro morphology and element contents of the modified sc-SWCNTs material were analyzed and characterized by the scanning electron microscope(SEM),energy dispersive X-ray spectroscope and Raman spectroscope.The results show that HAuCl_(4)is successfully compounded onto the surface of sc-SWCNTs.And the gas sensitivity test results indicate that the sc-SWCNT gas sensor modified by HAuCl_(4)exhibits a higher response value and a lower limit of detection.The response value of the gas sensor to NO_(2)at a volume fraction of 1×10^(-6)is 1.25,which is 1.47 times that of the pure sc-SWCNT gas sensor.The volume fraction limit of detection of the gas sensor to NO_(2)reaches 2.4×10^(-9),and the gas sensor has excellent selectivity and repeatability for the gas.Meanwhile,the sc-SWCNT gas sensor modified by HAuCl_(4)also exhibits excellent long-term stability.

关 键 词：半导体性单壁碳纳米管(sc-SWCNT) 室温气体传感器 复合材料 纳米材料 二氧化氮(NO_(2)) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]