面向倏逝波传感的光纤谐振腔设计与封装研究  

Design and packaging of optical fiber resonators for evanescent wave sensing

作　　者：赵荣宇 崔建功[1] 余亚鑫 杨玉华[1] 张国军[1] 张文栋[1] ZHAO Rongyu;CUI Jiangong;YU Yaxin;YANG Yuhua;ZHANG Guojun;ZHANG Wendong(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,山西太原030051

出　　处：《传感器与微系统》2022年第6期21-24,共4页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2019YFC0119800);山西省基础研究计划资助项目(202103021224203);国家自然科学基金面上资助项目(52175553);山西省“1331工程”重点学科建设计划项目。

摘　　要：微纳光纤环形谐振腔具有尺寸小、灵敏度高的优点,被广泛应用于应力、温度、湿度等物理量的传感,如何提高器件的稳定性和灵敏度成为近年来研究的热点。面向倏逝波传感应用,仿真分析了不同尺寸参数和封装材料对微纳光纤谐振腔倏逝波效应和光学传输特性的影响。通过工艺和封装材料的优化,制备出品质因数达到10^(4)的高品质结型环形谐振腔。研究结果表明:高折射率、低折射率差的封装材料有助于增强倏逝波效应,保护器件并提高器件的品质因数,提升倏逝波传感的灵敏度。本研究为微纳光纤环形谐振腔在倏逝波传感领域的应用积累了研究基础。Micro-nano fiber ring resonators have the advantages of small size and high sensitivity,and are widely used in the sensing of physical quantities such as stress,temperature,and humidity.How to improve the stability and sensitivity of the device has become a hot research topic in recent years.For evanescent wave sensing applications,the effects of different size parameters and packaging materials on the evanescent wave effect and optical transmission characteristics of micro-nano fiber resonators are simulated and analyzed.Through the optimization of process and packaging materials,a high-quality Knot-type ring resonator with a quality factor of 10^(4) is fabricated.Research results show that encapsulation materials with high refractive index and low refractive index difference help to enhance the evanescent wave effect,protect the device and improve the quality factor of the device.It can improve the sensitivity of evanescent wave sensing.This study accumulates a research foundation for the application of micro-nano ring fiber resonators in the field of evanescent wave sensing.

关 键 词：微纳光纤 环形谐振腔 倏逝波传感 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN253[自动化与计算机技术—控制科学与工程]