脉冲调制微波放电等离子体的数值模拟  

Numerical simulation of pulse modulated microwave discharge plasma

作　　者：刘鹏 李娜 陈童 刘壹顺 杜军[1] 潘杰[1] 秦绍华[1] LIU Peng;LI Na;CHEN Tong;LIU Yi Shun;DU Jun;PAN Jie;QIN Shao Hua(School of Physics and Electronics,Shandong Normal University,Jinan 250014,China)

机构地区：[1]山东师范大学物理与电子科学学院,山东济南250014

出　　处：《南昌大学学报（理科版）》2022年第2期136-146,共11页Journal of Nanchang University(Natural Science)

基　　金：国家自然科学基金资助项目(52077129)。

摘　　要：建立零维空气与氩气微波放电等离子体数值模型,研究调节约化电场强度和占空比对空气和氩气微波放电等离子体的影响,系统地阐述不同约化电场强度和占空比下电子密度的时间演化与平均粒子密度的变化,以及空气反应中粒子的主要生成路径。计算结果表明:在放电阶段,随着约化电场强度的增加,空气与氩气微波放电等离子体的电子密度峰值呈增大趋势。随着占空比的增加,空气微波放电等离子体电子密度峰值呈减小趋势,氩气等离子体电子密度峰值保持不变。大部分粒子的平均密度随着约化电场强度和占空比的增大而增大,且氩气等离子体的平均电子密度高于空气的。This paper presented a zero dimensional numerical model of air and argon microwave discharge plasma and investigateed the effects of the reduced electric field intensity and the duty cycle on air and argon microwave discharge plasma.The time evolution of electron density and the change of average particle density was described under different reduced electric field intensity and duty cycle.Also,the main generation paths of different particles on air reaction were also discussed.The results showed that the peak electron density of air and argon microwave discharge plasma increases with the increase of reduced electric field intensity.With the increase of duty cycle,the peak electron density of air microwave discharge plasma decreased,while the peak electron density of argon plasma remained unchanged.The average density of most particles increased with the increase of reduced electric field intensity and duty cycle,and the average electron density of argon plasma was higher than that of air.

关 键 词：微波放电 等离子体 脉冲调制 约化电场强度 占空比 

分 类 号：O539[理学—等离子体物理]