基于频分复用技术的激光反馈干涉二维动态位移测量  

Laser Feedback Interferometer for Two-Dimensional Dynamic Displacement Measurement Based on Frequency Division Multiplexing Technique

作　　者：杨秦 陈磊[1] 郭冬梅[1] 王洁[1] 夏巍[1] 郝辉[1] 王鸣[1] Yang Qin;Chen Lei;Guo Dongmei;Wang Jie;Xia Wei;Hao Hui;Wang Ming(School of Computer and Electronic Information,Nanjing Normal University,Nanjing 210023,Jiangsu,China)

机构地区：[1]南京师范大学计算机与电子信息学院,江苏南京210023

出　　处：《光学学报》2022年第10期64-70,共7页Acta Optica Sinica

基　　金：国家自然科学基金(51875292,51775283)。

摘　　要：提出了一种基于频分复用技术的激光反馈干涉二维动态位移测量方法。激光器输出的光被分为两路,分别以±1级自准直衍射角入射至反射光栅,并沿原光路返回至腔内产生激光反馈干涉效应。在±1级衍射光路中放置电光晶体对光束相位进行高频调制,利用频分复用技术实现二维动态位移的测量。实验结果表明,所提方法能够重构出物体的二维动态位移,位移分辨率可达10 nm量级。所提方案通过在激光反馈干涉仪中引入衍射光栅,提高了激光反馈干涉测量系统的稳定性和抗环境干扰能力,同时也为使用单光源进行多维度微位移测量提供了新的思路。A laser feedback interferometer for two-dimensional dynamic displacement measurement based on frequency division multiplexing technique is proposed.The output beam of laser is divided into two channels,which incident to the grating at±1 st-order auto-collimation diffraction angles respectively,and then return to the cavity along the original optical path to generate laser feedback interference.Eelectro-optic crystals are placed at±1 st-order diffractive optical paths to produce high frequency phase modulation.Two-dimensional dynamic displacement measurement can be realized by using frequency division multiplexing technique.The experimental results show that the proposed method can reconstruct the two-dimensional dynamic displacement of the object,and the displacement resolution can reach the order of 10 nm.By introducing a diffraction grating into the laser feedback interferometer,the proposed scheme not only improves the stability and anti-environmental interference ability of laser feedback interference measurement system,but also provides a new idea for multi-dimensional micro-displacement measurement using single light source.

关 键 词：测量 激光反馈干涉 高频调制 频分复用 微位移测量 

分 类 号：TN249[电子电信—物理电子学]