中红外仿生复合微纳结构减反射表面研究  

Anti-Reflection Surface of Mid-Infrared Bionic Composite Micro-Nano Structure

作　　者：马子烨 欧阳名钊 付跃刚[1] 吴锦双 周见红 任航 张自强 Ma Ziye;Ouyang Mingzhao;Fu Yuegang;Wu Jinshuang;Zhou Jianhong;Ren Hang;Zhang Ziqiang(Key Laboratory of Optical Control and Optical Information Transmission Technology,Ministry of Education,Changchun University of Science and Tecluiology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电测控与光信息传输技术教育部重点实验室,吉林长春130022

出　　处：《光学学报》2022年第10期247-255,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61705018);中国中央政府地方科技发展基金会(202002037JC);中国111工程(D21009,D17017);吉林省科技发展计划项目(20190302098G);吉林省教育厅科学技术研究项目(JJKH20210814KJ)。

摘　　要：利用原子层沉积技术共形生长的特点,同时利用自组装掩模刻蚀技术,在单晶硅基底上制备了具有低深宽比和满占空比特点的Al_(2)O_(3)-Si复合微纳结构表面。光谱反射率测试结果表明,在底端满占空比、微结构深宽比接近1:1的情况下,入射角在8°时复合微纳结构表面在3~5μm谱段的平均反射率小于3.5%。纳米压痕测试结果表明,Al_(2)O_(3)-Si复合微纳结构表面的弹性恢复率较单一硅基底结构增加10.14%,证明沉积氧化铝薄膜具有提升抗反射微纳结构力学性能的作用。In this paper,the composite micro-nano structure surface of Al_(2)O_(3)-Si with a low ratio of depth to width and full duty ratio was prepared on the monocrystalline silicon substrate by using the self-assembly mask etch technology as well as the conformal growth feature of atomic layer deposition technology.The results of spectral reflectance tests show that when the bottom attains the full duty ratio and the ratio of depth to width is close to 1:1,the average reflectance of the composite micro-nano structure surface in the frequency band of 3--5μm is less than 3.5%at an incident angle of 8°.The results of nano-indentation tests demonstrate that the elastic recovery rate of the composite micro-nano structure surface of Al_(2)O_(3)-Si is 10.14%higher than that of single silicon substrates,which proves that the deposited alumina film can improve the mechanical properties of the anti-reflection micro-nano structure.

关 键 词：薄膜 复合微纳结构表面 氧化铝原子层沉积 中红外抗反射 弹性恢复率 

分 类 号：O485[理学—固体物理]