电化学溶解对掩膜电化学沉积表面质量改进研究  

Research on Surface Quality Improvement of the Electrochemical DissolutionBased on Mask Electrochemical Deposition

作　　者：杨炆縚 张彦 韩国峰 蔡康捷 吴传冬 YANG Wentao;ZHANG Yan;HAN Guofeng;CAI Kangjie;WU Chuandong(School of Mechanical and Power Engineering,Nanjing Tech University,Nanjing 211800,China;National Key Laboratory for Remanufacturing,Beijing 100071,China)

机构地区：[1]南京工业大学机械与动力工程学院,江苏南京211800 [2]再制造技术国家重点实验室,北京100071

出　　处：《电加工与模具》2022年第3期26-30,共5页Electromachining & Mould

基　　金：江苏省六大人才高峰项目(JXQC-009);江苏省研究生实践创新计划项目(SJCX21_0494)。

摘　　要：为解决微纳三维结构的高质量加工难题,提出基于掩膜化学沉积的复合电化学加工技术,通过对比试验和负向脉冲参数优化试验,分析了负向脉冲个数、负向脉冲峰值电流及负向脉冲宽度对微纳三维结构表面粗糙度的影响规律。结果表明:复合电化学加工技术可有效降低微纳三维结构表面粗糙度值,且随着负向脉冲个数增大,微纳三维结构的表面粗糙度值呈线性下降,负向脉冲峰值电流和负向脉冲宽度增大,表面粗糙度值呈先降低后增大的趋势。综合试验结果,电化学复合加工的最佳负向脉冲个数为20000,负向脉冲峰值电流为70 mA,负向脉冲宽度为0.5 ms。To solve the problem of high-quality machining of micro/nano three-dimensional structure,a composite electrochemical machining method based on mask electrochemical deposition has been proposed.Through comparative test and negative pulse parameters optimization test,the effects of negative pulse quantities,peak current and pulse width on surface roughness of micro/nano three-dimensional structure were analyzed.The result showed that the composite machining method can effectively reduce the surface roughness of micro/nano three-dimensional structure.Meanwhile,with the increase of the number of negative pulses,the surface roughness value of micro/nano three-dimensional structure linearly decreases,and the surface roughness exhibited the trend of decreasing first and then increasing with the increase of negative pulse peak current and negative pulse width.According to the comprehensive result,the optimal number of negative pulses for electrochemical composite machining is 20000,the peak current is 70 mA and the pulse width is 0.5 ms.

关 键 词：掩膜电化学沉积 电化学溶解 表面粗糙度 负向脉冲参数 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]