Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings  

作　　者：JING ZHANG CHENXI HAO WANHUA ZHENG DIETER BIMBERG ANJIN LIU 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]Key Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [4]Bimberg Chinese-German Center for Green Photonics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China [5]Institute of Solid State Physics and Center of Nanophotonics,Technische Universitat Berlin,10623 Berlin,Germany

出　　处：《Photonics Research》2022年第5期1170-1176,共7页光子学研究（英文版）

基　　金：National Natural Science Foundation of China(62075209,61675193);Beijing Natural Science Foundation(Z200006).

摘　　要：We experimentally demonstrate for the first time to our knowledge electrically injected vertical-cavity surfaceemitting lasers(VCSELs) with post-supported high-contrast gratings(HCGs) at 940 nm. The HCG-VCSELs have two posts to support the air-suspended HCGs, which are realized by simple fabrication without critical point drying. The HCG-VCSEL achieves a threshold current of about 0.65 m A and a side-mode suppression ratio of 43.6 d B under continuous-wave operation at 25℃. Theoretically the HCG-VCSEL with a λ∕2-cavity for the transverse magnetic polarization has a smaller effective mode length of 1.38 ·(λ∕n). Thus, the relaxation resonance frequency can be increased by 16% compared with that of the conventional VCSEL. The modulation speed of 100 Gbit/s for the HCG-VCSEL is expected in the on–off keying modulation format. Our easy design of HCGVCSELs has great potential for applications in optical interconnects, sensing, illumination, and so on.

关 键 词：polarization CAVITY surface 

分 类 号：TN248[电子电信—物理电子学]