椭偏成像技术研究进展  

Research Progress of Imaging Ellipsometry

作　　者：张裕 连洁 魏铭洋 姜清芬 王宸琳 王月明 许镇 Zhang Yu;Lian Jie;Wei Mingyang;Jiang Qingfen;Wang Chenlin;Wang Yueming;Xu Zhen(Shandong Key Laboratory of Laser Technology and Application,School of Information Science and Engineering,Shandong University,Qingdao 266235,Shandong,China)

机构地区：[1]山东大学信息科学与工程学院山东省激光技术与应用重点实验室,山东青岛266235

出　　处：《激光与光电子学进展》2022年第10期1-12,共12页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(12074214);国家重点基础研究发展计划(2015CB921003);山东省重点研发计划(2017GGX201008)。

摘　　要：椭偏成像技术是为适应各种器件和材料小而精的趋势,在传统椭偏技术的基础上结合成像技术发展起来的一门测量技术。随着纳米技术的快速发展,该技术也呈现快速发展的趋势,在材料科学、生物学、半导体等很多领域有着广泛的应用。围绕该技术介绍它的原理和优缺点,对该技术的发展历程进行了梳理,描述该技术在材料科学、生物医学领域的应用进展,展望该技术的发展趋势。椭偏成像技术综述有助于促进该技术的发展和在更多领域的应用。Imaging ellipsometry is a measurement technology developed using traditional ellipsometry combined with imaging technology to adapt to the small and precise trends of various devices and materials. With the rapid development of nanotechnology, the technology has shown a trend of rapid developments and a wide range of applications in many fields, such as materials science, biology, and semiconductor. In this paper, we introduce the principle, advantages, and disadvantages of this technology. Furthermore, we comb the development history and describe the application progresses of this technology in material science and biomedicine, while discussing developing trends of this technology. This study hopes to serve as a review article on ellipsometric imaging technology and help promote the development of the technology and its application in more fields.

关 键 词：成像技术 椭偏测量术 光谱 纳米薄膜 生物传感器 

分 类 号：O433.1[机械工程—光学工程]