Direct generation of a stable multi-beam pulsed 355 nm UV laser based on a micro-lens array  

作　　者：Jiao Wei Pixian Jin Xuechen Cao Jing Su Huadong Lu Kunchi Peng 魏娇;靳丕铦;曹雪辰;苏静;卢华东;彭堃墀(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)

机构地区：[1]State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,China [2]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China

出　　处：《Chinese Optics Letters》2022年第4期49-53,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (Nos. 61975100 and 62027821);Program for the Innovative Talents of High Education Institutions of Shanxi;Fund for Shanxi “1331 Project” Key Subjects Construction

摘　　要：Multi-beam laser processing is a very popular method to improve processing efficiency. For this purpose, a compact and stable multi-beam pulsed 355 nm ultraviolet(UV) laser based on a micro-lens array(MLA) is presented in this Letter. It is worth noting that the MLA is employed to act as the spatial splitter as well as the coupling lens. With assistance of the MLA,the 1064 nm laser and 532 nm laser are divided into four sub-beams and focused at different areas of the third-harmonic generation(THG) crystal. As a result, the multi-beam pulsed 355 nm UV laser is successfully generated inside the THG crystal. The measured pulse widths of four sub-beams are shorter than 9 ns. Especially, the generated four sub-beams have good long-term power stability benefitting from the employed MLA. We believe that the generated stable multi-beam355 nm UV laser can meet the requirement of high-efficiency laser processing, and the presented method can also pave the way to generate stable and long-lived multi-beam UV lasers.

关 键 词：micro-lens array third-harmonic generation direct generation pulsed UV laser 

分 类 号：TN248[电子电信—物理电子学]