激光制备液态金属基柔性电子及其应用  

Liquid Metal Based Flexible Electronics Fabricated by Laser and Its Applications

作　　者：李昊昱[1,2,3] 张承君 杨青 侯洵 陈烽[1,2,3] Li Haoyu;Zhang Chengjun;Yang Qing;Hou Xun;Chen Feng(School of Electronic Science and Engineering,Department of Electronics andInformatics,Xi'an Jiaotong University,Xi'an 710049,Shaanxi,China;State Key Laboratory for Manufacturing System Engineering,Xi'an Jiaotong University,Xi'an 710049,Shaanxi,China;Shaanxi Key Laboratory of Photonics Technology for Information,Xi’an 710049,Shaanxi,China;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,Shaanxi,China)

机构地区：[1]西安交通大学电子与信息学部电子科学与工程学院,陕西西安710049 [2]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [3]陕西省信息光子技术重点实验室,陕西西安710049 [4]西安交通大学机械工程学院,陕西西安710049

出　　处：《中国激光》2022年第10期169-190,共22页Chinese Journal of Lasers

基　　金：国家自然科学基金(61875158,62175195);国家重点研发计划(2017YFB1104700);中央高校基本科研业务费。

摘　　要：随着科技的发展,柔性电子器件在医疗健康、柔性机器人以及人机交互领域中的应用越来越广泛。柔性电子器件的关键在于柔性电极材料,传统柔性电极材料如结构化的金属薄膜、金属纳米颗粒/线以及导电聚合物等存在高延展性与高导电性无法同时满足的问题。镓基液态金属作为一种室温下呈现液态的金属材料,具备金属高导电性的同时也具有无限延展性,是一种理想的柔性电极材料,是近年来的研究热点。对液态金属进行图案化处理是制备液态金属基柔性电子器件的必要环节。重点介绍了以浸润性调控的方法实现液态金属图案化的工艺。激光作为一种精密加工方式,被常用来制备各种功能表面,同时也是调控液体浸润性的主要手段之一。结合激光的高精密加工能力与液态金属优异的电学性能,能够实现高分辨率、多功能以及高集成度的液态金属电子器件制备。综述了近年来国内外在激光制备液态金属柔性电子器件方面的主要工作,并展望了未来激光制备高性能液态金属电子器件的前景。Significance Asthe next big trend in the development of the electronic industry,flexible electronics is a brand technologythat can revolutionize the future.At present,the application research of flexible electronic devices mainly focuses on human health detection,flexible robot,and human-computer interaction.Flexible electronic devices are realized by combining soft materials and flexible electrode materials to achieve high flexibility.Conventional flexible electrode materials,such as structured metal films,metal nanoparticles/wires,and conductive polymers,cannot meet high stretchability and high conductivity simultaneously.As a new kind of flexible electrode material,galliumbased liquid metal(Ga-LM)with high electrical conductivity and unlimited stretchability has become a research hotspotin recent years.Ga-LM has a melting point below 30℃and the almost negligible vapor pressure.It is nontoxic to the human body and has the excellent conductivity/thermal property,making it an ideal flexible electrode material.Ga-LM based flexible devices are fully flexible compared to traditional electrode materials,which can maintain their electronic performances even under large elastic deformation.This will lead to dramatic improvements in the performance of wearable electronics.The Ga-LM circuits are crucial for the preparation of flexible electronic devices.Although researchers have proposed many methods to prepare the Ga-LM flexible circuits such as screen printing,injection,and spray painting,there still remain problems of limited resolution and integration of Ga-LM circuits.Therefore,to develop a way for the preparation of miniaturized,high-integration,and multifunctional GaLM flexible devices is of great interest.Ga-LM patterning is a necessary step in the preparation of Ga-LM based flexible electronic devices.However,there exists a major challenge in Ga-LM patterning due to its fluidity.Hence,the patterning method by tuning the wettability of Ga-LM has been extensively explored in recent years.As a precision machining

关 键 词：激光技术 液态金属 激光 浸润性 图案化 柔性电子器件 

分 类 号：T-19[一般工业技术]