快照式干涉成像光谱仪阶梯面形误差特性分析  

Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer

作　　者：吕金光[1] 梁静秋[1] 王维彪[1] 秦余欣[1,2] 陶金 LüJinguang;Liang Jingqiu;Wang Weibiao;Qin Yuxin;Tao Jin(State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,Jilin,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2022年第9期251-260,共10页Acta Optica Sinica

基　　金：国家自然科学基金(61805239,61627819,61727818);吉林省科技发展计划(20190303063SF,20180201024GX,20150520101JH);中国科学院青年创新促进会基金(2018254)。

摘　　要：快照式干涉成像光谱仪通过微透镜阵列多重成像与多级微反射镜相位调制的光场耦合,实现动态场景图像光谱的同时探测。多级微反射镜的基片加工精度及膜层表面应力会导致阶梯面产生弯曲形变,从而影响光谱与成像的质量。分析了多级微反射镜阶梯面弯曲形变的面形误差特性,建立了阶梯面形误差的光场传输模型。计算结果表明,不同的阶梯面形误差分布情况会引起各视场干涉像点阵列不同的强度改变,并导致复原光谱中出现不同的噪声分布特征。阶梯面形误差会在不同成像视场的复原光谱中引入相位误差,并对相干像点的强度分布进行调制。重建光谱误差随着两个多级微反射镜阶梯矢高绝对值的增加单调递增,通过该关系便可以由阶梯矢高实测值对系统性能进行评估,并为器件制作提供理论指导。Through coupling the light fields of multiple imaging with a microlens array and phase modulation with multiple micro-mirrors,the snapshot interference imaging spectrometer achieves the simultaneous detection of the image and spectrum of a dynamic scene.The substrate processing accuracy and film surface stress cause the bending deformation of the step surfaces in the multiple micro-mirrors and further affect the quality of the spectrum and imaging.In this paper,the surface shape error characteristics of bending deformation of the step surfaces in the multiple micro-mirrors were analyzed to build a light field transmission model of the step surface shape error.The calculation results show that different distributions of the step surface shape error produce different intensity changes in the interference image point array in each field of view and different noise distribution characteristics in the recovered spectrum.The step surface shape error introduces a phase error into the recovered spectrum in different imaging fields and modulates the intensity distribution of coherent image points.The reconstructed spectrum error increases monotonically with the absolute value of the step sagittal height of the two multiple micromirrors.This relationship can be leveraged to evaluate system performance with the measured value of the step sagittal height and provide theoretical guidance for device fabrication.

关 键 词：光谱学 成像光谱仪 快照 傅里叶变换 

分 类 号：O433.1[机械工程—光学工程]