光激发气体传感器  

Light-activated gas sensors

作　　者：李秋桐 王晓雪 李华曜 郭新[1] Qiutong Li;Xiaoxue Wang;Huayao Li;Xin Guo(State Key Laboratory of Material Processing and Die&Mould Technology,School of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学材料科学与工程学院,材料加工与模具技术国家重点实验室,武汉430074 [2]华中科技大学光学与电子信息学院,武汉430074

出　　处：《科学通报》2022年第16期1837-1850,共14页Chinese Science Bulletin

基　　金：国家自然科学基金(61971202)资助。

摘　　要：随着人们环境健康与安全意识的提升,气氛识别的应用场景得到不断拓展,这对气体传感器的发展提出了集成化、便携化和智能化等全新要求.为突破热激发气体传感器必须在高温工作的局限,人们提出利用光代替热作为气体传感器激发能量的来源,光激发气体传感器应运而生.同时具有光电性能和气敏性能的半导体敏感材料是光激发气体传感器的核心.激发光波段与气敏材料带隙具有一一对应的关系,常见的气敏材料带隙均在3.0 eV以上,现有的绝大部分光激发气体传感器工作均须采用紫外光激发.然而,紫外光对人体有诸多的危害,拓展光激发气体传感器的可用光波段范围,是光激发气敏材料开发的重要目标.纳米形貌调控、材料修饰和材料复配等是目前最常用的能带调控手段.由于该领域的发展还停留在实验室阶段,如何与产业对接,制造出真实可用的产品是目前亟需突破的问题.简化工艺、降低成本且不牺牲器件性能是器件结构与工艺设计的首要原则.人们在克服诸如器件小型化、集成化以及工艺兼容性问题等方面已取得了部分阶段性进展.本文从光源种类、光源波长与材料带隙的匹配和器件结构设计等方面出发,系统地介绍光激发气体传感器的研究现状,提供新的研究思路.With continuous improvements of people’s life quality in recent years,application scenarios of gas sensors are expanding into many emerging fields,such as environmental monitoring,explosion detection,lithium-ion battery monitoring,olfactory simulation,personal healthcare monitoring,breath analysis and virtual reality(VR).However,gas sensors based on metal oxide semiconductors should mostly work at high temperatures.The high working temperature possesses safety concerns and high energy consumption,which hinder the applications of gas sensors in many fields.All the above problems can be effectively solved by light-activated sensors working at room temperature.Since no precious metals are needed to fabricate the heaters of the sensors,the production cost is greatly reduced,and the removal of the heaters can also directly reduce the energy consumption.More importantly,light-activated gas sensors have excellent room-temperature performances,thus avoiding the safety hazards associated with high operating temperatures.This review summarizes major efforts made for the development of light-activated gas sensors and gives a general overview of the progress.Firstly,different types of light sources are compared.LED is the ideal light source for light-activated gas sensors because of its small size,low price,mature manufacturing technology,multi-wavelength options and many other advantages.Secondly,gas sensing materials with different bandgaps are summarized.Gas sensing properties of light-activated sensing materials with different bandgaps are evaluated to provide readers a quick survey of light wavelengths and corresponding sensing materials.With bandgaps>3.1 e V,materials like SnO;,TiO;,NiO and ZnO can be activated by UV.Due to its high photon energy,UV is the most commonly used excitation light source.However,UV increases the risk of developing melanoma and skin cancer.Besides,in the solar radiation,the UV component(λ=200-400 nm)is only 5%-7%of the total energy,while the major component(ca.50%)is visible lights(λ=400-

关 键 词：光激发 气体传感器 器件结构设计 禁带宽度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]