偏振和位相调控分光膜的设计与制备  

Design and fabrication of polarization and phase modulated beam splitter

作　　者：潘永刚[1] 张四宝 刘政[2] 刘文成 李绵 张春娟 罗长新 Pan Yonggang;Zhang Sibao;Liu Zheng;Liu Wencheng;Li Mian;Zhang Chunjuan;Luo Changxin(Zhongshan Institute of Changchun University of Science and Techbology,Zhongshan 528437,China;Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119,China)

机构地区：[1]长春理工大学中山研究院,广东中山528437 [2]中国科学院西安光学精密机械研究所,陕西西安710119

出　　处：《红外与激光工程》2022年第5期394-400,共7页Infrared and Laser Engineering

基　　金：中国科学院自研项目(Y490771C01)。

摘　　要：偏振和位相调控分光膜是自由空间量子通信系统中不可缺少的光学元件,其性能直接影响通信质量,决定通信误码率。基于等效层设计理论,采用“介质+金属+介质”的特殊膜系结构,选用Ag金属和SiO_(2)、Al_(2)O_(3)、Ta_(2)O_(5)三种介质膜料作为镀膜材料,实现石英衬底45°入射时,1500~1600 nm波段消偏振平均透射/反射比为8.5:91.5,在1530、1540、1550、1560 nm控制位相的分光膜。采用电子束蒸发离子辅助沉积技术,优化沉积工艺,制备了分光膜样品。检测结果表明:在45°入射条件下,1500~1600 nm波段光谱平均透射/反射比为8.53:91.47,在1530、1540、1550、1560 nm处透射光位相差控制在5.02°以内,反射光位相差控制在8.05°以内,满足通信系统分光比及位相控制的要求。此外,该分光膜通过了相应的环境试验测试,满足可靠性要求。Polarization and phase controlled beam splitter is an indispensable optical element in free space quantum communication system.Its performance directly affects the communication quality and determines the communication error rate.Based on the theory of equivalent layer design,the special film structure of"dielectric+metal+dielectric"is adopted,and Ag metal material and SiO_(2),Al_(2)O_(3),Ta_(2)O_(5)dielectric material are selected to realize 45°incident angle on quartz substrate,and the average transmittance/reflectance ratio is 8.5:91.5 in the wavelength range from 1500 nm to 1600 nm.Phase is controlled at 1530,1540,1550,1560 nm.By optimizing the deposition process,the splitter film samples are prepared by electron beam evaporation with ion assisted technology.The test results show that the average transmittance/reflectance ratio is 8.53:91.47 in the wavelength range of 1500-1600 nm under the condition of 45°incidence.The transmitted phase difference controlled within 5.02°and the reflected phase controlled with 8.05°in the range of 1530,1540,1550,1560 nm,which meets the requirements of spectral energy splitting ratio and phase control of communication system.In addition,the film passed the corresponding environmental test,which meets the reliability requirements.

关 键 词：光学薄膜 分光膜 消偏振 位相 等效层 

分 类 号：O484[理学—固体物理]